PRE SPACE TRANSFORMER, SPACE TRANSFORMER MANUFACTURED USING THE PRE SPACE TRANSFORMER, AND SEMICONDUCTOR DEVICE INSPECTING APPARATUS INCLUDING THE SPACE TRANSFORMER
First Claim
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1. A pre space transformer comprising:
- a substrate having a first surface and a second surface, which is an opposite surface to the first surface; and
individual electrodes and common electrodes disposed on the first surface,wherein the individual electrodes and the common electrodes are repeatedly disposed while configuring a unit pattern.
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Accused Products
Abstract
Disclosed herein is a pre space transformer including: a substrate having a first surface and a second surface, which is an opposite surface to the first surface; and signal electrodes, power electrodes, and ground electrodes disposed on the first surface, wherein the signal electrodes, the power electrodes, and the ground electrodes are repeatedly disposed while configuring a unit pattern.
11 Citations
17 Claims
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1. A pre space transformer comprising:
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a substrate having a first surface and a second surface, which is an opposite surface to the first surface; and individual electrodes and common electrodes disposed on the first surface, wherein the individual electrodes and the common electrodes are repeatedly disposed while configuring a unit pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A space transformer compensating for a difference in a circuit pitch between a semiconductor device and a circuit board, the space transformer comprising:
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a substrate having a first surface facing the semiconductor device and a second surface facing the circuit board; individual electrodes and common electrodes disposed on the first surface while configuring one unit pattern; an insulating pattern covering the first surface so that the individual electrodes and the common electrodes are selectively opened; circuit patterns electrically connected to the individual electrodes and the common electrodes on the insulating pattern; and connection pins connected to the circuit patterns to thereby be connected to the semiconductor device. - View Dependent Claims (9, 10, 11, 12)
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13. A semiconductor device inspecting apparatus for inspecting electrical characteristics of a semiconductor device, the semiconductor device inspecting apparatus comprising:
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a printed circuit board receiving an inspecting signal transferred from a tester; an interposer disposed at one side of the printed circuit board facing the semiconductor device; and a space transformer receiving the inspecting signal transferred from the interposer to transfer the inspecting signal to the semiconductor device and compensating for a difference in a circuit pitch between the printed circuit board and the semiconductor device, wherein the space transformer includes; a substrate having a first surface facing the semiconductor device and a second surface facing the circuit board; individual electrodes and common electrodes disposed on the first surface while configuring one unit pattern; an insulating pattern covering the first surface so that the individual electrodes and the common electrodes are selectively opened; circuit patterns electrically connected to the individual electrodes and the common electrodes on the insulating pattern; and connection pins connected to the circuit patterns to thereby be connected to the semiconductor device. - View Dependent Claims (14, 15, 16, 17)
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Specification