PATTERNED STRUCTURED TRANSFER TAPE

• US 20140178646A1
• Filed: 12/21/2012
• Published: 06/26/2014
• Est. Priority Date: 12/21/2012
• Status: Active Grant

• Current Assignee: 3M Innovative Properties Company (3M Company)
• Original Assignee: 3M Innovative Properties Company (3M Company)
• Inventors: Wolk, Martin B., Free, Michael Benton, Vogel-Martin, Margaret M., Schwartz, Evan L., Mazurek, Mieczyslaw H., Collier, Terry O.
• Granted Patent: US 9,711,744 B2
• Time in Patent Office: Days
• US Class Current: 428/161
• CPC Class Codes: B32B 3/263 characterised by a layer having non-uniform thickness
• CPC Class Codes: B81C 2201/0191 Transfer of a layer from a carrier wafer to a device wafer
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C03C 17/28 with organic material C03C17/34, C03C17/44 take precedence
• CPC Class Codes: C03C 17/34 with at least two coatings having different compositions C03C17/44 takes precedence
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 7/161 using a previously coated surface, e.g. by stamping or by transfer lamination
• CPC Class Codes: G03F 7/34 Imagewise removal by selective transfer, e.g. peeling away
• CPC Class Codes: H01L 2221/68368 used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate
• CPC Class Codes: H10K 2102/00 Constructional details relating to the organic devices covered by this subclass
• CPC Class Codes: H10K 2102/311 Flexible OLED
• CPC Class Codes: H10K 2102/331 Nanoparticles used in non-emissive layers, e.g. in packaging layer
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/38 comprising colour filters or colour changing media [CCM]
• CPC Class Codes: H10K 71/80 using temporary substrates
• CPC Class Codes: H10K 77/111 Flexible substrates
• CPC Class Codes: H10K 85/141 comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE
• CPC Class Codes: H10K 85/40 Organosilicon compounds, e.g. TIPS pentacene
• CPC Class Codes: Y02E 10/549 Organic PV cells
• CPC Class Codes: Y02P 70/50 : Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10T 428/24521 : with component conforming to contour of nonplanar surface

Abstract

A transfer tape is disclosed that includes a carrier, a template layer having a first surface applied to the carrier and having a second surface opposite the first surface, wherein the second surface comprises a non-planar structured surface, a release coating disposed upon the non-planar structured surface of the template layer, and a backfill layer disposed upon and conforming to the non-planar structured surface of the release coating. In some embodiments, the backfill layer includes a silsesquioxane such as polyvinyl silsesquioxane. The disclosed transfer tape can be used to transfer replicated structures to a receptor substrate.

Claims

1. A transfer tape comprising:

a carrier;

a template layer having a first surface applied to the carrier and having a second surface opposite the first surface, wherein the second surface comprises a non-planar structured surface;

a release coating disposed upon the non-planar structured surface of the template layer;

a backfill layer disposed upon and conforming to the non-planar structured surface of the release coating; and

a release liner disposed upon the backfill layer,

wherein the template layer is capable of being removed from the backfill layer while leaving at least a portion of the structured surface of the backfill layer substantially intact.

3. A transfer tape according to claim 1, wherein the carrier comprises a transparent polymer.

4. A transfer tape according to claim 1, wherein the template layer comprises a photocurable organic resin.

5. A transfer tape according to claim 1, wherein the release coating comprises a chemically vapor deposited tetramethylsilane polymer.

6. A transfer tape according to claim 1, wherein the backfill layer is a planarizing layer.

7. A transfer tape according to claim 1, wherein the backfill layer comprises a bilayer of two different materials.

8. A transfer tape according to claim 7, wherein one of the bilayers comprises an adhesion promotion layer.

9. A transfer tape according to claim 1, wherein the backfill layer comprises a silsesquioxane.

10. A transfer tape according to claim 9, wherein the silsesquioxane comprises polyvinyl silsesquioxane.

11. An article comprising:

a transfer tape according to claim 1; and

a receptor substrate adjacent to the backfill layer.

12. An article according to claim 11, wherein the receptor substrate comprises flexible glass.

13. An article according to claim 11, wherein the backfill layer comprises two or more materials.

14. An article according to claim 13, wherein one of the two or more materials is an adhesion promotion layer.

15. An article according to claim 14, wherein the adhesion promotion layer is patterned.

16. An article according to claim 11, wherein the backfill layer is crosslinked.

17. An article according to claim 11, wherein the backfill layer comprises a structured uncrosslinked pattern and a structured crosslinked pattern.

18. An article according to claim 17, wherein when the release coating disposed upon the structured side of the template layer and the backfill layer disposed upon the release coating are separated from the transfer tape, the structured uncrosslinked pattern reflows and is substantially unstructured.

19. An article according to claim 14, wherein the backfill layer is cured.

2. (canceled)

20. A transfer tape comprising:

a carrier;

a template layer having a first surface applied to the carrier and having a second surface opposite the first surface, wherein the second surface comprises a non-planar structured surface;

a patterned cured backfill layer disposed upon the non-planar structured surface; and

a release liner disposed upon the patterned cured backfill layer.

22. A transfer tape according to claim 20 further comprising a crosslinked unstructured layer in contact with the patterned cured backfill layer and also in contact with the portion of the template layer not covered by the patterned cured backfill layer.

21. (canceled)

23. A transfer tape comprising:

a carrier;

a template layer having a first surface applied to the carrier and having a second surface opposite the first surface, wherein the second surface comprises a non-planar structured surface;

an unpatterned cured sacrificial backfill layer disposed upon the non-planar structured surface; and

a receptor substrate having an interface with the backfill layer,

wherein there are bonding regions of uncured portions of the backfill layer and non-bonding regions of cured portions of the backfill layer at the interface of the backfill layer and the receptor substrate.