DRESSER
First Claim
Patent Images
1. A dresser for dressing a polishing pad, comprising:
- an attachment secured to a dresser shaft for rotating the dresser;
a disk holder removably attached to the attachment by a magnetic force; and
a dresser disk removably attached to the disk holder, the dresser disk having a dressing surface,wherein each of the attachment and the disk holder has magnet for generating the magnetic force.
1 Assignment
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Accused Products
Abstract
A dresser includes an attachment secured to a dresser shaft for rotating the dresser, a disk holder removably attached to the attachment by a magnetic force, and a dresser disk removably attached to the disk holder. The dresser disk has a dressing surface. Each of the attachment and the disk holder has magnet for generating the magnetic force.
31 Citations
11 Claims
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1. A dresser for dressing a polishing pad, comprising:
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an attachment secured to a dresser shaft for rotating the dresser; a disk holder removably attached to the attachment by a magnetic force; and a dresser disk removably attached to the disk holder, the dresser disk having a dressing surface, wherein each of the attachment and the disk holder has magnet for generating the magnetic force. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A dresser for dressing a polishing pad, comprising:
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an attachment secured to a dresser shaft for rotating the dresser; and a brush disk removably attached to the attachment by a magnetic forces, the brush disk having a dressing surface, wherein each of the attachment and the brush disk has magnet for generating the magnetic three. - View Dependent Claims (9, 10, 11)
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Specification