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MEMS Based Membrane Sensor System and Method of Use

  • US 20140180610A1
  • Filed: 12/21/2012
  • Published: 06/26/2014
  • Est. Priority Date: 12/21/2012
  • Status: Active Grant
First Claim
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1. A micro-electromechanical systems (MEMS) sensor system for a membrane based water filtration plant comprising:

  • a remote telemetry unit (RTU), a supervisory control and data acquisition unit (SCADA), and a plurality of MEMS sensors for measuring pressure, flow rate. and conductivity of a stream;

    said water filtration plant is comprised of a train comprised of a membrane vessel containing a plurality of membrane elements;

    said membrane elements receive a feed stream and produce a concentrate stream and a permeate stream;

    said membrane elements are arranged in series creating interfaces between each membrane element;

    said MEMS sensors measure the flow rate, pressure, and conductivity of said feed stream, concentrate stream, and permeate stream at said membrane interfaces;

    said membrane vessel receives a feed stream and produces a permeate stream and a concentrate steam;

    conventional pressure sensors measure the pressure of said membrane vessel permeate, concentrate, and feed streams;

    conventional conductivity sensors measure the conductivity of said membrane vessel permeate, concentrate, and feed streams;

    conventional flow sensors measure the flow rate of said membrane vessel permeate, concentrate, and feed streams;

    conventional temperature sensor measures the temperature of said membrane vessel feed stream;

    said RTU communicates with said MEMS sensors and said SCADA to provide said MEMS sensor pressure and conductivity measurements to said SCADA, said RTU communicates wirelessly with said MEMS sensors;

    said conventional sensors provide measurements directly to said SCADA;

    wherein said SCADA uses said MEMS sensor and said conventional sensor measurements to identify compromised membrane elements.

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