MEASUREMENT APPARATUS AND MEASUREMENT METHOD

• US 20140182150A1
• Filed: 12/23/2013
• Published: 07/03/2014
• Est. Priority Date: 12/28/2012
• Status: Abandoned Application

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Nishikawa, Yuya, Kuramoto, Yoshiyuki, Nakauchi, Akihiro
• Application Number:
  US14/138,378
• Publication Number:
  US 20140182150A1
• Time in Patent Office: Days
• US Class Current: 33/503
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures
• CPC Class Codes: G01B 21/20 for measuring contours or curvatures, e.g. determining profile
• CPC Class Codes: G01B 5/012 Contact-making feeler heads therefor
• CPC Class Codes: G01B 5/20 for measuring contours or curvatures

Abstract

The present invention provides a measurement apparatus for measuring a shape of an object to be measured, comprising a measuring head configured to perform measurement in a first measurement mode and perform measurement in a second measurement mode having measurement accuracy higher than that of the first measurement mode, a detection unit configured to detect an occupancy region of the object to be measured, and a control unit configured to control the measuring head, wherein in the first measurement mode, the control unit moves, based on a detection result of the detection unit, the measuring head not to touch the object to be measured, and in the second measurement mode, the control unit moves, based on a measurement result in the first measurement mode, the measuring head to satisfy an allowable condition in the second measurement mode.

Claims

1. A measurement apparatus for measuring a shape of an object to be measured, comprising:

a measuring head configured to perform measurement in a first measurement mode, and perform measurement in a second measurement mode having measurement accuracy higher than that of the first measurement mode;

a detection unit configured to detect an occupancy region of the object to be measured; and

a control unit configured to control the measuring head,

wherein in the first measurement mode, the control unit moves, based on a detection result of the detection unit, the measuring head not to touch the object to be measured, and

in the second measurement mode, the control unit moves, based on a measurement result in the first measurement mode, the measuring head to satisfy an allowable condition in the second measurement mode.

2. The apparatus according to claim 1, wherein

the detection unit detects that the object to be measured falls within a predetermined allowable region, and

when the detection unit detects that the object to be measured falls within the allowable region, the control unit moves the measuring head outside the allowable region in the first measurement mode.

3. The apparatus according to claim 1, wherein based on the occupancy region detected by the detection unit, the control unit moves the measuring head outside the occupancy region in the first measurement mode.

4. The apparatus according to claim 1, further comprising

a sensor disposed on the measuring head and configured to detect the presence/absence of the object to be measured in a moving direction of the measuring head,

wherein based on an output from the sensor, the control unit moves the measuring head not to touch the object to be measured.

5. The apparatus according to claim 1, wherein in the second measurement mode, the control unit controls an attitude of the measuring head based on a position of the measuring head.

6. The apparatus according to claim 1, wherein in the second measurement mode, based on a measurement result in the first measurement mode, the control unit moves the measuring head so that a distance from a surface of the object to be measured becomes constant.

7. The apparatus according to claim 1, wherein the control unit specifies, based on a measurement result in the first measurement mode, a type, a position and an attitude of the object to be measured, and decides a moving path of the measuring head in the second measurement mode based on the position, the attitude, and a moving path of the measuring head prepared for the type.

8. The apparatus according to claim 1, wherein the measuring head includes an illumination unit configured to illuminate the object to be measured with light, and an imaging unit configured to image the object to be measured which is illuminated with the light, and

the control unit commonly uses at least one of the illumination unit and the imaging unit when measuring the object to be measured in the first measurement mode and when measuring the object to be measured in the second measurement mode.

9. The apparatus according to claim 1, wherein

the measuring head includes a light source configured to emit light, a detector configured to detect light, and a reference surface,

in the first measurement mode, a distance between the measuring head and a surface of the object to be measured is obtained using the light source and the detector by a time-of-flight method, and

in the second measurement mode, the distance between the measuring head and the surface of the object to be measured is obtained using the light source, the reference surface, and the detector by an interference method of detecting, by the detector, an interference beam obtained by reference light which has been reflected by the reference surface and light to be measured which has been reflected by the surface of the object to be measured.

10. The apparatus according to claim 1, wherein

the measuring head includes a contact probe, and

in the second measurement mode, a distance between the measuring head and a surface of the object to be measured is obtained by bringing the contact probe into contact with the object to be measured.

11. A measurement apparatus for measuring a shape of an object to be measured, comprising:

a measuring head configured to perform measurement in a first measurement mode, and perform measurement in a second measurement mode having measurement accuracy higher than that of the first measurement mode; and

a control unit configured to control the measuring head,

wherein in the first measurement mode, the control unit moves the measuring head outside an allowable region within which the object to be measured should fall while the object to be measured falls within the allowable region, and

in the second measurement mode, the control unit moves, based on a measurement result in the first measurement mode, the measuring head to satisfy an allowable condition in the second measurement mode.

12. A measurement method of measuring a shape of an object to be measured by using a measuring head to perform measurement in a first measurement mode and perform measurement in a second measurement mode having measurement accuracy higher than that of the first measurement mode, the method comprising:

detecting an occupancy region of the object to be measured;

moving, in the first measurement mode, based on a result of the detecting, the measuring head not to contact the object to be measured; and

moving, in the second measurement mode, based on a measurement result in the first measurement mode, the measuring head to satisfy an allowable condition in the second measurement mode.