ANGULAR VELOCITY SENSOR
First Claim
1. An angular velocity sensor comprising:
- first and second mass bodies;
a first frame provided at an outer side of the first and second mass bodies so as to be spaced apart from the first and second mass bodies;
a first flexible part respectively connecting the first and second mass bodies to the first frame;
a second flexible part respectively connecting the first and second mass bodies to the first frame;
a second frame provided at an outer side of the first frame so as to be spaced apart from the first frame;
a third flexible part connecting the first and second frames to each other; and
a fourth flexible part connecting the first and second frames to each other,wherein the first and second mass bodies are respectively disposed at both sides of the fourth flexible part, and the first frame has a thickness thinner than that of the second frame.
1 Assignment
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Accused Products
Abstract
Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part connecting the first and second mass bodies to the first frame in a Y axis direction, respectively; a second flexible part connecting the first and second mass bodies to the first frame in an X axis direction, respectively; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other in the X axis direction; and a fourth flexible part connecting the first and second frames to each other in the Y axis direction, wherein the first frame has a thickness in a Z axis direction thinner than that of the second frame.
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Citations
39 Claims
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1. An angular velocity sensor comprising:
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first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies so as to be spaced apart from the first and second mass bodies; a first flexible part respectively connecting the first and second mass bodies to the first frame; a second flexible part respectively connecting the first and second mass bodies to the first frame; a second frame provided at an outer side of the first frame so as to be spaced apart from the first frame; a third flexible part connecting the first and second frames to each other; and a fourth flexible part connecting the first and second frames to each other, wherein the first and second mass bodies are respectively disposed at both sides of the fourth flexible part, and the first frame has a thickness thinner than that of the second frame. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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Specification