NANOPORE SENSOR DEVICE
First Claim
1. A sensor structure comprising:
- a first dielectric material layer and a second dielectric material layer in contact with each other at a planar interface, wherein a cavity is embedded within said first dielectric material layer and said second dielectric material layer; and
an electrode line embedded within said second dielectric material layer and straddling said cavity, wherein first portions of said electrode line are in contact with a surface of said first dielectric material layer, and a second portion of said electrode line that is not in contact with said first dielectric material layer is spaced from a plane including said interface by a uniform distance.
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Accused Products
Abstract
A pair of electrode plates can be provided by directional deposition and patterning of a conductive material on sidewalls of a template structure on a first dielectric layer. An electrode line straddling the center portion is formed. A dielectric spacer and a conformal conductive layer are subsequently formed. Peripheral electrodes laterally spaced from the electrode line are formed by pattering the conformal conductive layer. After deposition of a second dielectric material layer that encapsulates the template structure, the template structure is removed to provide a cavity that passes through the pair of electrode plates, the electrode line, and the peripheral electrodes. A nanoscale sensor thus formed can electrically characterize a nanoscale string by passing the nanoscale string through the cavity while electrical measurements are performed employing the various electrodes.
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Citations
12 Claims
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1. A sensor structure comprising:
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a first dielectric material layer and a second dielectric material layer in contact with each other at a planar interface, wherein a cavity is embedded within said first dielectric material layer and said second dielectric material layer; and an electrode line embedded within said second dielectric material layer and straddling said cavity, wherein first portions of said electrode line are in contact with a surface of said first dielectric material layer, and a second portion of said electrode line that is not in contact with said first dielectric material layer is spaced from a plane including said interface by a uniform distance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification