IN-PLANE SENSING LORENTZ FORCE MAGNETOMETER
First Claim
1. A magnetic field sensor comprising:
- a driving element where in, an electric current flows through the driving element, a Lorentz force acts on the driving element resulting in a torque about a first axis in response to a magnetic field along a second axis substantially parallel to a plane of a substrate and the driving element is coiled-shaped;
a sensing element configured to rotate about the first axis substantially parallel to the plane of the substrate in response to the magnetic field;
a coupling element mechanically couples the driving element to the sensing element and the driving element, the sensing element and the coupling element disposed in the plane, substantially parallel to the substrate; and
at least two anchors configured to connect the driving element, the sensing element, and the coupling element to the substrate.
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Accused Products
Abstract
A magnetic field sensor includes a driving element through which an electric current circumnavigates the driving element. A Lorentz force acts on the driving element resulting in a torque about a first axis in response to a magnetic field along a second axis substantially parallel to a plane of a substrate. The driving element is coiled-shaped. A sensing element of the magnetic field sensor is configured to rotate about the first axis substantially parallel to the plane of the substrate in response to the magnetic field and a coupling element mechanically couples the driving element to the sensing element. The driving element, the sensing element, and the coupling element are disposed in the plane, substantially parallel to the substrate. At least two anchors are configured to connect the driving element, the sensing element, and the coupling element to the substrate.
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Citations
33 Claims
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1. A magnetic field sensor comprising:
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a driving element where in, an electric current flows through the driving element, a Lorentz force acts on the driving element resulting in a torque about a first axis in response to a magnetic field along a second axis substantially parallel to a plane of a substrate and the driving element is coiled-shaped; a sensing element configured to rotate about the first axis substantially parallel to the plane of the substrate in response to the magnetic field; a coupling element mechanically couples the driving element to the sensing element and the driving element, the sensing element and the coupling element disposed in the plane, substantially parallel to the substrate; and at least two anchors configured to connect the driving element, the sensing element, and the coupling element to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of measuring a magnetic field along 2-axes comprising:
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driving inner drive current through an inner drive coil causing displacement of the sense element related to the magnetic field; driving outer drive current through an outer coil at a phase that is substantially ninety degrees phase shifted relative to that of the inner drive current, causing displacement of the sense element related to the magnetic field; measuring the displacement of the sense element, in phase, using the outer drive current; determining the magnetic field of the sense element along a first-axis; measuring the displacement of the sense element, in phase, using the inner drive current; determining the magnetic field of the sense element along an second-axis; terminating the inner drive current and the outer drive current.
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14. A magnetic field sensor comprising:
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a first driving element where in, a first electric current flows through the first driving element, a Lorentz force acts on the first driving element resulting in a torque about a first axis in response to a first magnetic field along a second axis substantially parallel to a plane of a substrate; a second driving element where in, a second electric current flows through the second driving element, a Lorentz force acts on the second driving element resulting in a torque about the second axis in response to a second magnetic field along the first axis substantially parallel to a plane of a substrate; a sensing element configured to rotate about the first axis substantially parallel to the plane of the substrate in response to the first or the second magnetic field; a first coupling element that mechanically couples the first driving element to the second driving element; a second coupling element mechanically couples the first driving element to the sensing element and the first driving element, the second driving element, the sensing element, the first coupling element and the second coupling element are disposed in the plane; and at least two anchor configured to connect the first driving element to the substrate and at least two anchor configured to connect the second driving element to the substrate, - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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Specification