In-Line Transistor Bandwidth Measurement
First Claim
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1. A method of measuring transistor bandwidth of a device under test in-line and on-wafer, the method comprising:
- disposing a measurement circuit on a chip within a wafer, the measurement circuit including a ring oscillator generating an oscillation frequency for transition through the device under test on the wafer; and
obtaining an amplitude based on the measurement circuit for the corresponding oscillation frequency.
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Abstract
A method and apparatus measure transistor bandwidth of a device under test in-line and on-wafer. The method includes disposing a measurement circuit on a chip within a wafer, the measurement circuit including a ring oscillator generating an oscillation frequency for transition through the device under test on the wafer, and obtaining an amplitude gain based on the measurement circuit for the corresponding frequency.
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Citations
20 Claims
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1. A method of measuring transistor bandwidth of a device under test in-line and on-wafer, the method comprising:
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disposing a measurement circuit on a chip within a wafer, the measurement circuit including a ring oscillator generating an oscillation frequency for transition through the device under test on the wafer; and obtaining an amplitude based on the measurement circuit for the corresponding oscillation frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of measuring transistor bandwidth of a device under test in-line and on-wafer, the method comprising:
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applying digital inputs to a decoder to enable corresponding select lines; driving a ring oscillator with the select lines to generate a corresponding frequency output; and obtaining amplitude from the device under test based on the frequency output. - View Dependent Claims (13, 14, 15)
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16. An apparatus to measure transistor bandwidth of a device under test in-line and on-wafer, the apparatus comprising:
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a decoder including digital input lines and output select lines disposed on a chip within a wafer that includes the device under test; a ring oscillator configured to be driven by the select lines and to generate a frequency output; and a peak and valley detector configured to receive an output from the device under test based on the frequency output of the ring oscillator and to measure amplitude as a peak-to-valley value. - View Dependent Claims (17, 18, 19, 20)
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Specification