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In-Line Transistor Bandwidth Measurement

  • US 20140184242A1
  • Filed: 01/02/2013
  • Published: 07/03/2014
  • Est. Priority Date: 01/02/2013
  • Status: Abandoned Application
First Claim
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1. A method of measuring transistor bandwidth of a device under test in-line and on-wafer, the method comprising:

  • disposing a measurement circuit on a chip within a wafer, the measurement circuit including a ring oscillator generating an oscillation frequency for transition through the device under test on the wafer; and

    obtaining an amplitude based on the measurement circuit for the corresponding oscillation frequency.

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