SENSOR ELEMENT, DEW CONDENSATION SENSOR, HUMIDITY SENSOR, METHOD FOR DETECTING DEW CONDENSATION, AND DEW-POINT MEASUREMENT DEVICE

• US 20140186215A1
• Filed: 05/30/2012
• Published: 07/03/2014
• Est. Priority Date: 06/13/2011
• Status: Abandoned Application

• Current Assignee: Nippon Steel & Sumikin Chemical Co., Ltd. (Nippon Steel Corporation)
• Original Assignee: Nippon Steel & Sumikin Chemical Co., Ltd. (Nippon Steel Corporation)
• Inventors: Shinta, Ryuzo, Matsumura, Yasufumi, Enomoto, Yasushi
• Application Number:
  US14/125,311
• Publication Number:
  US 20140186215A1
• Time in Patent Office: Days
• US Class Current: 422/69
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G01N 21/3554 for determining moisture content
• CPC Class Codes: G01N 21/47 Scattering, i.e. diffuse reflection G01N21/25, G01N21/41 take precedence G01N21/55 takes precedence
• CPC Class Codes: G01N 21/554 detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons
• CPC Class Codes: G01N 27/4146 involving nanosized elements, e.g. nanotubes, nanowires
• CPC Class Codes: Y10S 977/773 Nanoparticle, i.e. structure having three dimensions of 100 nm or less
• CPC Class Codes: Y10S 977/92 Detection of biochemical

Abstract

A dew condensation sensor is described, including a nano-composite for generating local surface plasmon resonance, a light reflecting member disposed on one side of the nano-composite, a protection layer laminated on the light reflecting member, a light source/light receiver disposed facing the nano-composite, a spectroscope (or photo-detector) for detecting the light reflected by the light source/light receiver, a controller connected to the light source/light receiver and the spectroscope (or photo-detector) and used for overall control thereof, and a display unit connected to the controller. The dew condensation sensor detects occurrence of dew condensation based on the variation in the absorption spectrum, the absorption intensity or the reflected-light intensity of the local surface plasmon resonance of the nano-composite.

Claims

1. A sensor element, comprising:

a metal fine-particle dispersed composite; and

a detection unit detecting variation in an optical signal or an electrical signal generated by interaction between a detected substance and the metal fine-particle dispersed composite,

wherein the metal fine-particle dispersed composite comprises a matrix layer comprising a solid framework and voids formed by the solid framework, and metal fine-particles immobilized to the solid framework, and has constitutions a) to d);

a) the solid framework containing an aluminum oxyhydroxide or an alumina hydrate and forming a three-dimensional network structure;

b) the metal fine-particles having a mean particle diameter in a range of 3 to 100 nm, with a proportion of 60% or more having particle diameters in a range of 1 to 100 nm;

c) the metal fine-particles being formed in the matrix layer by heat-reducing a metal ion and being present in a manner that the metal fine-particles are not in contact with one another and neighboring metal fine-particles are apart from each other by a distance equal to or larger than the particle diameter of a larger one of the neighboring metal fine-particles; and

d) the metal fine-particles being dispersed three-dimensionally in the matrix layer, wherein each metal fine-particle has a portion exposed in the voids of the matrix layer.

3. The sensor element of claim 1, wherein a void ratio of the metal fine-particle dispersed composite is in a range of 15 to 95%.

4. The sensor element of claim 1, wherein a volume fraction of the metal fine-particles in the metal fine-particle dispersed composite is in a range of 0.05 to 30%.

5. The sensor element of claim 1, wherein the metal fine-particles comprise Au, Ag or Cu.

6. The sensor element of claim 1, wherein the metal fine-particles generate a localized surface plasmon resonance when interacting with light of a wavelength of 380 nm or more.

2. (canceled)

7. A dew condensation sensor, comprising:

a metal fine-particle dispersed composite;

a light reflecting member disposed on one side of the metal fine-particle dispersed composite;

a light source irradiating the metal fine-particle dispersed composite with light;

a light receiver receiving light reflected by a surface of the metal fine-particle dispersed composite and the light reflecting member; and

a spectroscopic device measuring an absorption spectrum of the reflected light or a photo-detector measuring an intensity of the reflected light,

wherein the metal fine-particle dispersed composite is characterized by comprising a matrix layer comprising a solid framework and voids formed by the solid framework, and metal fine-particles immobilized to the solid framework, and has constitutions a) to d);

a) the solid framework containing an aluminum oxyhydroxide or an alumina hydrate and forming a three-dimensional network structure;

b) the metal fine-particles having a mean particle diameter in a range of 3 to 100 nm, with a proportion of 60% or more having particle diameters in a range of 1 to 100 nm;

c) the metal fine-particles being formed in the matrix layer by heat-reducing a metal ion and being present in a manner that the metal fine-particles are not in contact with one another and neighboring metal fine-particles are apart from each other by a distance equal to or larger than the particle diameter of a larger one of the neighboring metal fine-particles; and

d) the metal fine-particles being dispersed three-dimensionally in the matrix layer, wherein each metal fine-particle has a portion exposed in the voids of the matrix layer.

8. The dew condensation sensor of claim 7, wherein the metal fine-particle dispersed composite comprises:

a first surface receiving light emitted from a light source; and

a second surface formed opposite to the first surface; and

the light reflecting member is disposed in contact with the second surface.

9. The dew condensation sensor of claim 7, wherein the light reflective member comprises:

a light transmitting layer; and

a metal layer laminated on the light transmitting layer.

10. The dew condensation sensor of claim 9, wherein the light reflecting member further comprises a protection layer covering the metal layer.

11. The dew condensation sensor of claim 10, wherein the protection layer comprises a Ni—

Cr alloy.

12. A dew point measurement device, comprising:

the dew condensation sensor of claim 7;

a temperature measurement device measuring a temperature of the metal fine-particle dispersed composite; and

a temperature control device performing a temperature adjustment of the metal fine-particle dispersed composite.

13. A dew condensation detecting method that detects an occurrence of dew condensation based on a variation in an absorption spectrum, an absorption intensity or a reflected-light intensity of local surface plasmon resonance, by means of the dew condensation sensor of claim 7.

14. A sensor element, comprising:

a light source emitting light;

a light receiver receiving light; and

a metal fine-particle dispersed composite interposed in an optical path between the light source and the light receiver,

wherein the metal fine-particle dispersed composite comprises a matrix layer comprising a solid framework and voids formed by the solid framework, and metal fine-particles immobilized to the solid framework, and has constitutions a) to d);

a) the solid framework containing an aluminum oxyhydroxide or an alumina hydrate and forming a three-dimensional network structure;

b) the metal fine-particles having a mean particle diameter in a range of 3 to 100 nm, with a proportion of 60% or more having particle diameters in a range of 1 to 100 nm;

c) the metal fine-particles being formed in the matrix layer by heat-reducing a metal ion and being present in a manner that the metal fine-particles are not in contact with one another and neighboring metal fine-particles are apart from each other by a distance equal to or larger than the particle diameter of a larger one of the neighboring metal fine-particles; and

d) the metal fine-particles being dispersed three-dimensionally in the matrix layer, wherein each metal fine-particle has a portion exposed in the voids of the matrix layer.

16. A humidity sensor comprising the sensor element of claim 14 to detect variation in humidity.

17. The humidity sensor of claim 16, wherein the light source irradiates the metal fine-particle dispersed composite with light of at least two kinds of wavelengths including a wavelength for humidity measurement and a wavelength for correction.

15. A sensor element, comprising:

a light source emitting light;

a light receiver receiving light;

a light transmitting member forming an optical path between the light source and the light receiver; and

a metal fine-particle dispersed composite disposed in proximity to the light transmitting member,

wherein the metal fine-particle dispersed composite comprises a matrix layer comprising a solid framework and voids formed by the solid framework, and metal fine-particles immobilized to the solid framework, and has constitutions a) to d);

a) the solid framework containing an aluminum oxyhydroxide or an alumina hydrate and forming a three-dimensional network structure;

b) the metal fine-particles having a mean particle diameter in a range of 3 to 100 nm, with a proportion of 60% or more having particle diameters in a range of 1 to 100 nm;

c) the metal fine-particles being formed in the matrix layer by heat-reducing a metal ion and being present in a manner that the metal fine-particles are not in contact with one another and neighboring metal fine-particles are apart from each other by a distance equal to or larger than the particle diameter of a larger one of the neighboring metal fine-particles; and

d) the metal fine-particles being dispersed three-dimensionally in the matrix layer, wherein each metal fine-particle has a portion exposed in the voids of the matrix layer.

19. A humidity sensor comprising the sensor element of claim 15 to detect variation in humidity.

20. The humidity sensor of claim 19, wherein the light source irradiates the metal fine-particle dispersed composite with light of at least two kinds of wavelengths including a wavelength for humidity measurement and a wavelength for correction.

18. A field effect transistor sensor element, comprising:

a substrate;

a source region and a drain region having a polarity opposite to a polarity of the substrate;

a gate laminated body formed on the substrate between the source region and the drain region; and

a metal fine-particle dispersed composite disposed on the gate laminated body,

wherein the metal fine-particle dispersed composite comprises a matrix layer comprising a solid framework and voids formed by the solid framework, and metal fine-particles immobilized to the solid framework, and has constitutions a) to d);

a) the solid framework containing an aluminum oxyhydroxide or an alumina hydrate and forming a three-dimensional network structure;

b) the metal fine-particles having a mean particle diameter in a range of 3 to 100 nm, with a proportion of 60% or more having particle diameters in a range of 1 to 100 nm;

c) the metal fine-particles being formed in the matrix layer by heat-reducing a metal ion and being present in a manner that the metal fine-particles are not in contact with one another and neighboring metal fine-particles are apart from each other by a distance equal to or larger than the particle diameter of a larger one of the neighboring metal fine-particles; and

d) the metal fine-particles being dispersed three-dimensionally in the matrix layer, wherein each metal fine-particle has a portion exposed in the voids of the matrix layer.