HYBRID MEMS BUMP DESIGN TO PREVENT IN-PROCESS AND IN-USE STICTION
First Claim
1. A method for forming a micro-electro-mechanical systems (MEMS) device, the method comprising:
- providing a substrate;
forming a metal layer over the substrate;
patterning the metal layer to form a pair of sensing plates and a plurality of metal bumps, wherein a pivot axis of a proof mass is defined between the pair of sensing plates, and wherein each of the plurality of metal bumps are positioned proximate to a respective distal end of the proof mass, wherein each metal bump generally inhibits charge-induced stiction associated with the proof mass;
forming an oxide layer over the substrate; and
patterning the oxide layer to form an oxide bump associated with each of the pair of sensing plates, wherein each oxide bump is positioned between the respective sensing plate and the pivot axis, and wherein each oxide bump generally acts as a shock absorber by preventing the distal ends of the proof mass from contacting the metal bumps during shock loading.
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Abstract
A micro-electro-mechanical systems (MEMS) device and method for forming a MEMS device is provided. A proof mass is suspended a distance above a surface of a substrate by a fulcrum. A pair of sensing plates are positioned on the substrate on opposing sides of the fulcrum. Metal bumps are associated with each sensing plate and positioned near a respective distal end of the proof mass. Each metal bump extends from the surface of the substrate and generally inhibits charge-induced stiction associated with the proof mass. Oxide bumps are associated with each of the pair of sensing plates and positioned between the respective sensing plate and the fulcrum. Each oxide bump extends from the first surface of the substrate a greater distance than the metal bumps and acts as a shock absorber by preventing the distal ends of the proof mass from contacting the metal bumps during shock loading.
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Citations
20 Claims
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1. A method for forming a micro-electro-mechanical systems (MEMS) device, the method comprising:
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providing a substrate; forming a metal layer over the substrate; patterning the metal layer to form a pair of sensing plates and a plurality of metal bumps, wherein a pivot axis of a proof mass is defined between the pair of sensing plates, and wherein each of the plurality of metal bumps are positioned proximate to a respective distal end of the proof mass, wherein each metal bump generally inhibits charge-induced stiction associated with the proof mass; forming an oxide layer over the substrate; and patterning the oxide layer to form an oxide bump associated with each of the pair of sensing plates, wherein each oxide bump is positioned between the respective sensing plate and the pivot axis, and wherein each oxide bump generally acts as a shock absorber by preventing the distal ends of the proof mass from contacting the metal bumps during shock loading. - View Dependent Claims (2, 3, 4, 5)
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6. A method for forming a micro-electro-mechanical systems (MEMS) device, the method comprising:
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providing a substrate having a first surface; forming a proof mass having a fulcrum, wherein a lower surface of the proof mass is suspended a first distance above the first surface of the substrate by the fulcrum, and wherein the proof mass is configured to rotate about the fulcrum; forming a pair of sensing plates associated with the first surface of the substrate and positioned on opposing sides of the fulcrum; forming a metal bump associated with each of the pair of sensing plates and positioned proximate to a respective distal end of the proof mass, wherein each metal bump extends a second distance from the first surface of the substrate; and forming an oxide bump associated with each of the pair of sensing plates and positioned between the respective sensing plate and the fulcrum, wherein each oxide bump extends a third distance from the first surface of the substrate. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13)
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14. A method for forming a micro-electro-mechanical systems (MEMS) device, the method comprising:
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providing a substrate; suspending a proof mass over the substrate by a fulcrum, wherein the proof mass is configured to rotate about the fulcrum; forming first and second sensing plates on respective sides of the fulcrum on the substrate; forming a plurality of metal bumps on the substrate, wherein the plurality of metal bumps are positioned proximate to each distal end of the proof mass, and wherein each of the plurality of metal bumps extends from the substrate; and forming a plurality of oxide bumps on the substrate, wherein the plurality of oxide bumps are positioned between the respective first and second sensing plates and the fulcrum, and wherein each of the plurality of oxide bumps from the substrate a greater distance than the plurality of metal bumps. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification