MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE SIGNAL COMPONENTS
First Claim
1. A microelectromechanical gyroscope, comprising:
- a supporting body;
a sensing mass elastically coupled to the supporting body and movable with respect to the supporting body according to a driving axis and a sensing axis;
a microelectromechanical driving loop coupled to the sensing mass and operable to maintain the sensing mass in oscillation according to the driving axis at a frequency;
a reading device coupled to the sensing mass and configured to provide an output signal representative of an angular speed of the supporting body, the reading device including a reading amplifier configured to provide a transduction signal representative of a position of the sensing mass according to the sensing axis; and
a compensation device configured to reduce spurious signal components in quadrature with respect to a velocity of oscillation of the sensing mass according to the driving axis, the compensation device being configured to form a feedback control loop with the reading amplifier and configured to extract, from the transduction signal, an error signal representative of quadrature components in the transduction signal and configured to provide the reading amplifier with a compensation signal that is a function of the error signal and is configured to reduce the quadrature components in the transduction signal.
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Accused Products
Abstract
A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.
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Citations
17 Claims
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1. A microelectromechanical gyroscope, comprising:
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a supporting body; a sensing mass elastically coupled to the supporting body and movable with respect to the supporting body according to a driving axis and a sensing axis; a microelectromechanical driving loop coupled to the sensing mass and operable to maintain the sensing mass in oscillation according to the driving axis at a frequency; a reading device coupled to the sensing mass and configured to provide an output signal representative of an angular speed of the supporting body, the reading device including a reading amplifier configured to provide a transduction signal representative of a position of the sensing mass according to the sensing axis; and a compensation device configured to reduce spurious signal components in quadrature with respect to a velocity of oscillation of the sensing mass according to the driving axis, the compensation device being configured to form a feedback control loop with the reading amplifier and configured to extract, from the transduction signal, an error signal representative of quadrature components in the transduction signal and configured to provide the reading amplifier with a compensation signal that is a function of the error signal and is configured to reduce the quadrature components in the transduction signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A system, comprising:
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a control unit; and a microelectromechanical gyroscope coupled to the control unit, the gyroscope including; a driving assembly; a sensing mass configured to be driven in oscillation by the driving assembly along a driving axis, the driving assembly and the sensing mass configured to form a driving loop configured to maintain the sensing mass in oscillation along the driving axis at a frequency; a reading assembly coupled to the sensing mass and configured to provide an output signal that represents an angular speed of the system, the reading assembly including; a reading amplifier configured to provide a transduction signal representative of a position of the sensing mass with respect to a sensing axis; and a compensation device coupled to the reading amplifier and configured to form a feedback control loop that is configured to extract, from the transduction signal, an error signal representative of quadrature components in the transduction signal and configured to provide the reading amplifier with a compensation signal that is a function of the error signal and is configured to reduce the quadrature components in the transduction signal. - View Dependent Claims (13, 14)
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15. A method, comprising:
controlling a microelectromechanical gyroscope having a supporting body and a sensing mass, elastically coupled to the supporting body and movable with respect to the supporting body according to a driving axis and a sensing axis, the controlling including; oscillating the sensing mass according to the driving axis with a frequency; providing an output signal representative of an angular speed of the supporting body by providing a transduction signal representative of a position of the sensing mass according to the sensing axis; and reducing spurious signal components in quadrature with respect to a velocity of oscillation of the sensing mass according to the driving axis by extracting, from the transduction signal, an error signal representative of quadrature components in the transduction signal and providing feedback to the reading amplifier with a compensation signal which is a function of the error signal to reduce the quadrature components in the transduction signal. - View Dependent Claims (16, 17)
Specification