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MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE SIGNAL COMPONENTS

  • US 20140190258A1
  • Filed: 01/09/2014
  • Published: 07/10/2014
  • Est. Priority Date: 01/09/2013
  • Status: Active Grant
First Claim
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1. A microelectromechanical gyroscope, comprising:

  • a supporting body;

    a sensing mass elastically coupled to the supporting body and movable with respect to the supporting body according to a driving axis and a sensing axis;

    a microelectromechanical driving loop coupled to the sensing mass and operable to maintain the sensing mass in oscillation according to the driving axis at a frequency;

    a reading device coupled to the sensing mass and configured to provide an output signal representative of an angular speed of the supporting body, the reading device including a reading amplifier configured to provide a transduction signal representative of a position of the sensing mass according to the sensing axis; and

    a compensation device configured to reduce spurious signal components in quadrature with respect to a velocity of oscillation of the sensing mass according to the driving axis, the compensation device being configured to form a feedback control loop with the reading amplifier and configured to extract, from the transduction signal, an error signal representative of quadrature components in the transduction signal and configured to provide the reading amplifier with a compensation signal that is a function of the error signal and is configured to reduce the quadrature components in the transduction signal.

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