NOZZLE CLEANING DEVICE AND COATER PROVIDED WITH IT
First Claim
1. A nozzle cleaning device comprising a cleaner, a vacuum pipe and a vacuum pump;
- the cleaner has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, and the inner wall of the recessed hole is provided with a plurality of through-holes;
one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump.
1 Assignment
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Accused Products
Abstract
A nozzle cleaning device and a coater provided with the nozzle cleaning device are provided, the nozzle cleaning device comprise a cleaner, a vacuum pipe and a vacuum pump; the cleaner has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, and the inner wall of the recessed hole is provided with a plurality of through-holes; one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump. The nozzle cleaning device of the present invention can be used conveniently to remove the photoresist residue so as to clean the nozzle, which effectively improves the product yield and the production efficiency, and reduces the cost due to needing no expensive nanomaterials.
6 Citations
15 Claims
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1. A nozzle cleaning device comprising a cleaner, a vacuum pipe and a vacuum pump;
- the cleaner has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, and the inner wall of the recessed hole is provided with a plurality of through-holes;
one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump. - View Dependent Claims (2, 3, 4)
- the cleaner has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, and the inner wall of the recessed hole is provided with a plurality of through-holes;
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5. A coater comprising:
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a coating liquid output device filled with coating liquid, including a nozzle through which the coating liquid is sprayed; a nozzle cleaning device including a cleaner, a vacuum pipe and a vacuum pump, the cleaner has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, the inner wall of the recessed hole is provided with a plurality of through-holes;
one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump; anda transmission device connected to the bottom of the cleaning device, operable to controlling the movement of the cleaning device and providing a driving force to make the cleaning device up and down. - View Dependent Claims (6, 7, 8, 9, 10)
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11. A coater comprising:
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a coating liquid output device filled with coating liquid, including a nozzle through which the coating liquid is sprayed; and a nozzle cleaning device including a cleaner, a vacuum pipe, a vacuum pump, and a movable base;
the cleaner is mounted on the base and it has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, the inner wall of the recessed hole is provided with a plurality of through-holes;
one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump - View Dependent Claims (12, 13, 14, 15)
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Specification