MULTI-SPOT COLLECTION OPTICS
First Claim
1. An apparatus for detecting optical radiation emitted from an array of spots on an object, the apparatus comprising:
- a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots;
relay optics, configured to collect and focus the optical radiation from the array of spots on the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots; and
multiple detectors, each detector coupled to receive the optical radiation from a respective output end of a respective one of the light guides.
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Abstract
Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.
20 Citations
20 Claims
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1. An apparatus for detecting optical radiation emitted from an array of spots on an object, the apparatus comprising:
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a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots; relay optics, configured to collect and focus the optical radiation from the array of spots on the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots; and multiple detectors, each detector coupled to receive the optical radiation from a respective output end of a respective one of the light guides. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for detecting optical radiation emitted from an array of spots on an object, the method comprising:
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collecting and focusing the optical radiation from the array of spots on the object input ends of a plurality of light guides, the input ends being ordered in a geometrical arrangement corresponding to the array of the spots, so that each input end receives the optical radiation from a corresponding one of the spots; and detecting the optical radiation transmitted through the light guides using a respective detector coupled to a respective output end of each of the light guides. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification