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METHOD AND STRUCTURE FOR ADDING MASS WITH STRESS ISOLATION TO MEMS STRUCTURES

  • US 20140199799A1
  • Filed: 03/17/2014
  • Published: 07/17/2014
  • Est. Priority Date: 06/23/2009
  • Status: Active Grant
First Claim
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1. A method for fabricating a proof mass apparatus, the method comprising:

  • providing a thickness of silicon material coupled to at least one flexible element, the thickness of silicon material being configured to move in one or more spatial directions about the flexible element(s);

    forming a proof mass configured from a plurality of recessed regions in respective spatial regions of the thickness of silicon material;

    forming a glue material within each of the recessed regions; and

    forming a plug material overlying each of the recessed regions.

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