FERROELECTRIC RANDOM ACCESS MEMORY WITH OPTIMIZED HARDMASK
First Claim
1. A device structure comprising:
- a first electrode comprised of a first conductor;
a ferroelectric layer on the first electrode;
a second electrode on the ferroelectric layer, the second electrode comprised of a second conductor and having an upper surface; and
a cap layer on the upper surface of the second electrode,wherein the cap layer has a composition that is free of titanium.
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Accused Products
Abstract
Device structures, fabrication methods, and design structures for a capacitor of a memory cell of ferroelectric random access memory device. The capacitor may include a first electrode comprised of a first conductor, a ferroelectric layer on the first electrode, a second electrode on the ferroelectric layer, and a cap layer on an upper surface of the second electrode. The second electrode may be comprised of a second conductor, and the cap layer may have a composition that is free of titanium. The second electrode may be formed by etching a layer of a material formed on a layer of the second conductor to define a hardmask and then modifying the remaining portion of that material in the hardmask to have a comparatively less etch rate, when exposed to a chlorine-based reactive ion etch chemistry, than when initially formed.
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Citations
15 Claims
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1. A device structure comprising:
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a first electrode comprised of a first conductor; a ferroelectric layer on the first electrode; a second electrode on the ferroelectric layer, the second electrode comprised of a second conductor and having an upper surface; and a cap layer on the upper surface of the second electrode, wherein the cap layer has a composition that is free of titanium. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A design structure readable by a machine used in design, manufacture, or simulation of an integrated circuit, the design structure comprising:
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a first electrode comprised of a first conductor; a ferroelectric layer on the first electrode; a second electrode on the ferroelectric layer, the second electrode comprised of a second conductor and having an upper surface; and a cap layer on the upper surface of the second electrode, wherein the cap layer has a composition that is free of titanium. - View Dependent Claims (13, 14, 15)
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Specification