STRAIN SENSOR ELEMENT AND BLOOD PRESSURE SENSOR
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Abstract
A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.
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Citations
30 Claims
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1-11. -11. (canceled)
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12. A strain sensor element comprising:
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a laminated film comprising; a free layer comprising a magnetization having a magnetization direction which lies substantially perpendicularly to a plane direction of the laminated film under a condition of no external stress being applied; a reference layer comprising a magnetization; and a spacer layer provided between the free layer and the reference layer; a pair of electrodes configured to cause a current to flow through the laminated film perpendicularly to the plane direction thereof; and a substrate provided on either one of the pair of electrodes, wherein a rotation angle of the magnetization of the free layer in response to a distortion of the substrate is different from a rotation angle of the magnetization of the reference layer in response to distortion of the substrate. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A strain sensor element comprising:
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a plurality of strain sensor elements, each strain sensor element comprising; a laminated film comprising; a free layer comprising a magnetization having a magnetization direction which lies substantially perpendicularly to a plane direction of the laminated film under a condition of no external stress being applied; a reference layer comprising a magnetization; and a spacer layer provided between the free layer and the reference layer; a pair of electrodes configured to cause a current to flow through the laminated film perpendicularly to the plane direction thereof; and a substrate provided on either one of the pair of electrodes, wherein a rotation angle of the magnetization of the free layer in response to a distortion of the substrate is different from a rotation angle of the magnetization of the reference layer in response to distortion of the substrate, and wherein the plurality of strain sensor elements are connected in series.
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30. A blood pressure sensor comprising:
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a strain sensor element comprising; a laminated film comprising; a free layer comprising a magnetization having a magnetization direction which lies substantially perpendicularly to a plane direction of the laminated film under a condition of no external stress being applied; a reference layer comprising a magnetization; and a spacer layer provided between the free layer and the reference layer; a pair of electrodes configured to cause a current to flow through the laminated film perpendicularly to the plane direction thereof; and a substrate provided on either one of the pair of electrodes, wherein a rotation angle of the magnetization of the free layer in response to a distortion of the substrate is different from a rotation angle of the magnetization of the reference layer in response to distortion of the substrate.
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Specification