DIAPHRAGM-TYPE PRESSURE GAUGE

• US 20140208860A1
• Filed: 04/03/2014
• Published: 07/31/2014
• Est. Priority Date: 10/05/2011
• Status: Active Grant

• Current Assignee: Canon Anelva Corporation (Canon Inc.)
• Original Assignee: Canon Anelva Corporation (Canon Inc.)
• Inventors: MIYASHITA, Haruzo
• Granted Patent: US 9,581,513 B2
• Time in Patent Office: Days
• US Class Current: 73/724
• CPC Class Codes: G01L 19/02 Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means for aneroid barometers G01L7/14
• CPC Class Codes: G01L 9/0048 Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01L 9/12 by making use of variations in capacitance , i.e. electric circuits therefor
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel includes a housing into which the gas is introduced, and a sensor unit which is arranged in the housing, and includes a diaphragm electrode, a measurement surface of which is arranged parallel to an introduction direction of the gas. When the housing is attached to the vessel, the measurement surface of the diaphragm electrode is arranged parallel to a direction of gravitational force.

Claims

1. A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel, the gauge comprising:

a housing into which the gas is introduced; and

a sensor unit which is arranged in the housing, and includes a diaphragm electrode having a measurement surface arranged parallel to an introduction direction of the gas,

wherein when the housing is attached to the vessel, the measurement surface of the diaphragm electrode is arranged parallel to a direction of gravitational force.

3. The diaphragm-type pressure gauge according to claim 1, wherein the diaphragm electrode comprises two diaphragm electrodes, and

measurement surfaces of the two diaphragm electrodes are arranged parallel.

4. The diaphragm-type pressure gauge according to claim 3, wherein the housing includes an introduction path configured to introduce a gas into the vessel, and

measurement surfaces of the two diaphragm electrodes are arranged on two sides of a central axis of the introduction path.

5. The diaphragm-type pressure gauge according to claim 1, wherein the housing includes an introduction path configured to introduce a gas into the vessel, and

a measurement surface of the diaphragm electrode is spaced apart from a central axis of the introduction path.

2. A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel, the gauge comprising:

a housing into which the gas is introduced;

a sensor unit which is arranged in the housing, and includes a diaphragm electrode having a measurement surface arranged parallel to an introduction direction of the gas; and

an attaching portion configured to attach the housing to the vessel so as to make the measurement surface of the diaphragm electrode parallel to a direction of gravitational force.

6. A diaphragm-type pressure gauge which measures a pressure in a vessel to be measured, the gauge comprising:

a housing having an internal space communicating with an inside of the vessel;

a sensor unit which is arranged in the internal space and includes a fixed electrode and a diaphragm electrode facing the fixed electrode; and

an attaching portion configured to attach the housing to the vessel,

wherein a measurement surface of the diaphragm electrode, which faces the fixed electrode, is parallel to a direction in which a gas inside the vessel flows in the internal space, and

an outer surface of the housing is provided with a mark with which the diaphragm-type pressure gauge is attached to the vessel so as to make the measurement surface parallel to a direction of gravitational force.