OPTICAL ELEMENT
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Accused Products
Abstract
In order to make possible both good laser resistance and good antireflection properties, an optical element, in particular for UV lithography, comprising a substrate and a coating on the substrate having at least four layers, is proposed, wherein
- a first layer comprising a low refractive index inorganic fluoride compound is arranged on the substrate,
- a layer comprising an inorganic oxide-containing compound is arranged as a layer the most distant from the substrate, and
- at least two further layers each comprising an inorganic fluoride compound or an inorganic oxide-containing compound are arranged alternately between the first and the most distant layers.
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Citations
41 Claims
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1-18. -18. (canceled)
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19. An optical element, comprising:
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a substrate; and a coating supported by the substrate, wherein; the coating comprises, in order moving away from the substrate, a first layer, a second layer, a third layer, a fourth layer, and a fifth layer, the second layer comprises an inorganic fluoride having a low refractive index at a wavelength in the ultraviolet range; the third layer comprises an inorganic oxide; the fourth layer comprises an inorganic fluoride; and the fifth layer comprises an inorganic oxide. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. An optical element, comprising:
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a substrate; and a coating supported by the substrate, wherein; the coating comprises at least five layers; the at least five layers comprise alternating layers of inorganic oxide and inorganic fluoride materials; of the layers comprising an inorganic oxide, the layer furthest from the substrate has a first refractive index at a wavelength in the ultraviolet range; of the layers comprising an inorganic fluoride, the layer closest to the substrate has a second refractive index at the wavelength in the ultraviolet range; and the first refractive index is greater than the second refractive index.
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41. An optical element, comprising:
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a substrate; and a coating supported by the substrate, wherein; the coating comprises at least five layers; the at least five layers comprise alternating layers of inorganic oxide and inorganic fluoride materials; of the layers comprising an inorganic oxide, the layer closest to the substrate has a first refractive index at a wavelength in the ultraviolet range; of the layers comprising an inorganic fluoride, the layer second closest to the substrate has a second refractive index at the wavelength in the ultraviolet range; and the first refractive index is greater than the second refractive index.
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Specification