SEMICONDUCTOR DEVICE

• US 20140217464A1
• Filed: 09/13/2012
• Published: 08/07/2014
• Est. Priority Date: 09/27/2011
• Status: Active Grant

• Current Assignee: DENSO Corporation
• Original Assignee: DENSO Corporation
• Inventors: Higuchi, Yasushi, Fukatsu, Shigemitsu, Sumitomo, Masakiyo
• Granted Patent: US 9,178,050 B2
• Time in Patent Office: Days
• US Class Current: 257/139
• CPC Class Codes: H01L 29/0834 Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
• CPC Class Codes: H01L 29/0843 Source or drain regions of field-effect devices
• CPC Class Codes: H01L 29/1095 Body region, i.e. base region, of DMOS transistors or IGBTs cell layout H01L29/0696
• CPC Class Codes: H01L 29/4236 within a trench, e.g. trench gate electrode, groove gate electrode
• CPC Class Codes: H01L 29/42368 the thickness being non-uniform
• CPC Class Codes: H01L 29/42376 characterised by the length or the sectional shape
• CPC Class Codes: H01L 29/66348 with a recessed gate
• CPC Class Codes: H01L 29/7397 and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT

Abstract

In a semiconductor device, a trench gate has a bottom portion in a drift layer and a communication portion extending from a surface of a base layer to communicate with the bottom portion. A distance between adjacent bottom portions is smaller than a distance between adjacent communication portions in a x-direction. A region between adjacent trench gates is divided in a y-direction into an effective region as an electron injection source and an ineffective region which does not serve as the electron injection source. An interval L₁ (>0) of the ineffective region in the y-direction, a length D₁ of the communication portion in the z-direction, and a length D₂ of the bottom portion in the z-direction satisfy L₁≦2(D₁+D₂). The z-direction is orthogonal to a x-y plane defined by the x-direction and the y-direction which are orthogonal to each other.

Claims

1. A semiconductor device comprising:

a first-conductivity-type collector layer along a x-y plane defined by a x-direction and a y-direction which are orthogonal to each other;

a second-conductivity-type drift layer formed on a front side of the collector layer;

a first-conductivity-type base layer formed on the drift layer;

trench gates including trenches extending in the y-direction to form a pattern of stripes, the trenches extending from a surface of the base layer along the x-y plane to an inside of the drift layer by penetrating the base layer in a z-direction orthogonal to the x-y plane, the trench gates further including a gate insulation layer formed on walls of the trenches and a gate electrode formed on the gate insulation layer;

a second-conductivity-type emitter layer formed in a surface portion of the base layer and located on a side of the trench gate;

a collector electrode formed on a back side of the collector layer and electrically connected to the collector layer; and

an emitter electrode electrically connected to the emitter layer and the base layer, wherein

the trench gate includes a bottom portion located in the drift layer and a communication portion extending from the surface of the base layer to communicate with the bottom portion,

a distance between adjacent bottom portions in the x-direction is smaller than a distance between adjacent communication portions in the x-direction,

the gate insulation is thicker in the bottom portion than in the communication portion,

a region between adjacent trench gates is divided into an effective region and an ineffective region in the y-direction,

the effective region corresponds to the emitter layer and serves as an injection source for injecting charges into the drift layer when a voltage is applied to the gate electrode,

the ineffective region does not serve as the injection source even when the voltage is applied to the gate electrode, and

an interval L₁ (>

0) of the ineffective region in the y-direction, a length D₁ of the communication portion in the z-direction, and a length D₂ of the bottom portion in the z-direction satisfy the following relationship;

L₁≦

2(D₁+D₂).

2. The semiconductor device according to claim 1, wherein

the effective region is arranged at the interval L₁ in the y-direction, and

the ineffective region is located between adjacent effective regions in the y-direction.

3. The semiconductor device according to claim 2, further comprising:

a first-conductivity-type first high concentration base region formed in the surface portion of the base layer in the ineffective region, wherein

an impurity concentration of the first high concentration base region is higher than that of the base layer.

4. The semiconductor device according to claim 1, wherein

the emitter layer continuously extends in the y-direction along the trench gate,

the ineffective region includes a first-conductivity-type second high concentration base region having an impurity concentration higher than that of the base layer and lower than that of the emitter layer,

the second high concentration base region is intermittently divided and arranged at the interval L₁ in the y-direction,

the second high concentration base region is located in the base layer,

the second high concentration base region is in contact with the emitter layer in the z-direction and in contact with the trench gate in the x-direction, and

the effective region is located between adjacent second high concentration base regions.

5. The semiconductor device according to claim 1, wherein

the L₁ and the D₁ satisfy the following relationship:

L₁≦

2D₁.

6. The semiconductor device according to claim 1, wherein

the L₁ and the D₁ satisfy the following relationship:

D₁≦

L₁.

7. The semiconductor device according to claim 1, wherein

the effective region has a periodic structure so that each of the L₁ and a length L₂ of the effective region in the y-direction is constant.

8. The semiconductor device according to claim 1, further comprising:

a first-conductivity-type base contact layer formed in the surface portion of the base layer between the emitter layers between adjacent trench gates, wherein

the base contact layer extends to a depth greater than a depth to which the emitter layer extends, and

a length of the base contact layer in the x-direction is greater than the distance between adjacent bottom portions.