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STICTION RESISTANT MEMS DEVICE AND METHOD OF OPERATION

  • US 20140217929A1
  • Filed: 02/06/2013
  • Published: 08/07/2014
  • Est. Priority Date: 02/06/2013
  • Status: Active Grant
First Claim
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1. A microelectromechanical systems (MEMS) device comprising:

  • a substrate;

    a movable element positioned in spaced apart relationship above a surface of said substrate;

    at least one spring member interconnecting said movable element with said substrate, said at least one spring member enabling motion of said movable element, and said at least one spring member exhibiting a first stiffness;

    at least one electrode facing said movable element; and

    a voltage source in communication with said at least one electrode, said voltage source being configured to apply a spring softening voltage to said at least one electrode to shift a stiffness of said spring member from said first stiffness to a second stiffness, said second stiffness being less than said first stiffness.

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