WAVELENGTH SCANNING INTERFEROMETER AND METHOD FOR ASPHERIC SURFACE MEASUREMENT
First Claim
1. A wavelength scanning interferometer for an aspheric surface measurement, characterized by, comprising a translation platform (1), a measured aspheric surface (2), a first mirror group (3), a light splitter (4), a beam expander (6), a tunable laser (7), an imaging lens (8), a CCD camera (9), a reference plane mirror (10), an image card (11), a computer (12) and a data card (13), wherein the measured aspheric surface (2) is fixed on the translation platform (1), the measured aspheric surface (2), the first mirror group (3), the light splitter (4), the imaging lens (8) and the CCD camera (9) are coaxially placed in sequence, the reference plane mirror (10) is arranged at the bottom of the light splitter (4), the CCD camera (9), the image card (11), the computer (12) and the data card (13) are connected in sequence, the beam expander (6) is connected with the tunable laser (7), and the translation platform (1) and the tunable laser (7) are connected with the data card (13) respectively;
- a light beam emitted by the tunable laser (7) is expanded by the beam expander (6) to become a parallel light beam with wavefront divided into two beams by the light splitter (4), one beam is incident on the reference plane mirror (10) to become a reference light, and the other beam is focused by the first mirror group (3) and then is incident on the measured aspheric surface (2), the lights reflected by the reference mirror (10) and the measured aspheric surface (2) are re-superposed on the light splitter (4) to form interference;
interference fringes are acquired by the CCD camera (9) after passing through the imaging lens (8), and encounter optical-electric conversion in the CCD camera (9) and then analogue-digital conversion in the image card (11), and finally enter into the computer (12) which performs signal processing so as to obtain an optical path difference and surface shape information.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention discloses a wavelength scanning interferometer and a method for an aspheric surface measurement. The wavelength scanning interferometer comprises a set of tunable lasers (7) used as a light source, a Twyman-Green interferometer used for generating interference fringes, a translation platform (1) used for scanning an optical path difference along an optical axis, an image card (11) used for converting interference data to a digital signal and transmitting the digital signal to a computer (12), and a data card (13) used for synchronizing the actions of a CCD camera (9) and the translation platform (1). Different from the traditional aspheric surface measurement method, the interferometer is capable of measuring a surface with a high aspheric surface degree or a wavefront, and without the need of a zero compensation mirror. In addition, the method does not need a complex and usually expensive multi-dimensional movement platform.
5 Citations
6 Claims
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1. A wavelength scanning interferometer for an aspheric surface measurement, characterized by, comprising a translation platform (1), a measured aspheric surface (2), a first mirror group (3), a light splitter (4), a beam expander (6), a tunable laser (7), an imaging lens (8), a CCD camera (9), a reference plane mirror (10), an image card (11), a computer (12) and a data card (13), wherein the measured aspheric surface (2) is fixed on the translation platform (1), the measured aspheric surface (2), the first mirror group (3), the light splitter (4), the imaging lens (8) and the CCD camera (9) are coaxially placed in sequence, the reference plane mirror (10) is arranged at the bottom of the light splitter (4), the CCD camera (9), the image card (11), the computer (12) and the data card (13) are connected in sequence, the beam expander (6) is connected with the tunable laser (7), and the translation platform (1) and the tunable laser (7) are connected with the data card (13) respectively;
- a light beam emitted by the tunable laser (7) is expanded by the beam expander (6) to become a parallel light beam with wavefront divided into two beams by the light splitter (4), one beam is incident on the reference plane mirror (10) to become a reference light, and the other beam is focused by the first mirror group (3) and then is incident on the measured aspheric surface (2), the lights reflected by the reference mirror (10) and the measured aspheric surface (2) are re-superposed on the light splitter (4) to form interference;
interference fringes are acquired by the CCD camera (9) after passing through the imaging lens (8), and encounter optical-electric conversion in the CCD camera (9) and then analogue-digital conversion in the image card (11), and finally enter into the computer (12) which performs signal processing so as to obtain an optical path difference and surface shape information. - View Dependent Claims (2, 4, 5)
- a light beam emitted by the tunable laser (7) is expanded by the beam expander (6) to become a parallel light beam with wavefront divided into two beams by the light splitter (4), one beam is incident on the reference plane mirror (10) to become a reference light, and the other beam is focused by the first mirror group (3) and then is incident on the measured aspheric surface (2), the lights reflected by the reference mirror (10) and the measured aspheric surface (2) are re-superposed on the light splitter (4) to form interference;
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3. A wavelength scanning interferometer for an aspheric surface measurement, characterized by, comprising a translation platform (1), a measured aspheric surface (2), a second mirror group (14), a light splitter (4), a beam expander (6), a tunable laser (7), an imaging lens (8), a CCD camera (9), an image card (11), a computer (12), a data card (13) and the like, wherein the measured aspheric surface (2) is fixed on the translation platform (1), the measured aspheric surface (2), the second mirror group (14), the light splitter (4), the imaging lens (8) and the CCD camera (9) are coaxially placed in sequence, the CCD camera (9), the image card (11), the computer (12) and the data card (13) are connected in sequence, the beam expander (6) is connected with the tunable laser (7), and the translation platform (1) and the tunable laser (7) are connected with the data card (13) respectively;
- a light beam emitted by the tunable laser (7) is expanded by the beam expander (6) to become a parallel light beam, a part of the parallel light beam is reflected to the second mirror group (14) by the light splitter (4), no antireflection film is plated on the last surface of the second mirror group (14), so that a part of the light incident on the last surface is reflected back to the light splitter (4), and the other part is focused by the second mirror group (14) to be incident on the measured aspheric surface (2) and is reflected back by the measured aspheric surface (2);
the two parts of light are re-superposed on the light splitter (4) to form interference, interference fringes are acquired by the CCD camera (9) after passing through the imaging lens (8), and encounter optical-electric conversion in the CCD camera (9) and then analogue-digital conversion in the image card (11), and finally enter into the computer (12) which performs signal processing so as to obtain an optical path difference and surface shape information. - View Dependent Claims (6)
- a light beam emitted by the tunable laser (7) is expanded by the beam expander (6) to become a parallel light beam, a part of the parallel light beam is reflected to the second mirror group (14) by the light splitter (4), no antireflection film is plated on the last surface of the second mirror group (14), so that a part of the light incident on the last surface is reflected back to the light splitter (4), and the other part is focused by the second mirror group (14) to be incident on the measured aspheric surface (2) and is reflected back by the measured aspheric surface (2);
Specification