Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
First Claim
1. A substrate processing apparatus comprising:
- a control unit configured to control an execution of a recipe defining an order of processing a substrate and manage a process status of the substrate; and
a manipulation unit configured to receive a resume command instructing to resume a stopped operation,wherein the control unit changes the process status to a processing state so as to control an execution of the recipe, and changes the process status to a pause state in case that an unprocessed substrate is present among substrates to be processed according to the recipe, when the execution of the recipe is stopped due to an error occurring during the execution of the recipe,wherein the manipulation unit transmits the resume command to the control unit when the resume command is received after the error is canceled and an operation for resuming the execution of the recipe is performed, andwherein the control unit changes the process status from the pause state to the processing state, and resumes the execution of the recipe so as to process the unprocessed substrate when receiving the resume command.
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Accused Products
Abstract
Provided is a substrate processing apparatus capable of efficiently resuming processing of unprocessed substrates after an error occurs during processing of substrates. In the substrate processing apparatus that executes a recipe defining an order of processing substrates and manages process status of the substrates, the process status are changed to a processing state so as to execute the recipe, are changed to a paused state when unprocessed substrates are present among the substrates to be processed according to the recipe, due to an error occurring during the execution of the recipe, and are changed from the paused state to the processing state to resume the execution of the recipe so as to process the unprocessed substrates when the error is canceled and a operation is performed to resume the execution of the recipe.
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Citations
14 Claims
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1. A substrate processing apparatus comprising:
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a control unit configured to control an execution of a recipe defining an order of processing a substrate and manage a process status of the substrate; and a manipulation unit configured to receive a resume command instructing to resume a stopped operation, wherein the control unit changes the process status to a processing state so as to control an execution of the recipe, and changes the process status to a pause state in case that an unprocessed substrate is present among substrates to be processed according to the recipe, when the execution of the recipe is stopped due to an error occurring during the execution of the recipe, wherein the manipulation unit transmits the resume command to the control unit when the resume command is received after the error is canceled and an operation for resuming the execution of the recipe is performed, and wherein the control unit changes the process status from the pause state to the processing state, and resumes the execution of the recipe so as to process the unprocessed substrate when receiving the resume command. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A non-transitory computer-readable recording medium storing a program for causing a computer of a substrate processing apparatus to perform a control sequence for controlling an execution of a recipe defining an order of processing a substrate and managing a process status of the substrate, the control sequence comprising:
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(a) changing the process status to a processing state so as to perform a process according to the recipe; (b) changing the process status to an aborted state in case an unprocessed substrate is not present among substrates to be processed according to the recipe when the process according to the recipe is stopped due to an error occurring during the execution of the recipe; and (c) changing the process status to a paused state in case the unprocessed substrate is present among the substrates to be processed according to the recipe when the process according to the recipe is stopped due to the error occurring during the execution of the recipe. - View Dependent Claims (12)
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13. A substrate processing apparatus comprising:
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a control unit configured to control an execution of a recipe defining an order of processing a substrate and manage a status of a substrate processing apparatus; and a manipulation unit configured to receive a command, wherein the control unit changes the status of the substrate processing apparatus from a running state to an abnormal termination state when an error occurs during the execution of the recipe, wherein the manipulation unit transmits an instruction to change the status of the substrate processing apparatus to the control unit when receiving a predetermined command, and wherein the control unit changes the status of the substrate processing apparatus from the abnormal termination state to an idle state when receiving the command from the manipulation unit, and changes the status of the substrate processing apparatus from the idle state to a standby state and then to the running state so as to resume the execution of the recipe when the error is canceled and a recovery operation for resuming the execution of the recipe is performed.
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14. A non-transitory computer-readable medium storing a control program for causing a computer of a substrate processing apparatus to control an execution of a recipe defining an order of processing a substrate and manage a status of the substrate processing apparatus, the control program comprising:
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(a) changing the status of the substrate processing apparatus from a processing state to an abnormal termination state when an error occurs during the execution of the recipe; (b) changing the status of the substrate processing apparatus from the abnormal termination state to an idle state when a predetermined command is received; and (c) changing the status of the substrate processing apparatus from the idle state to a standby state and then to the processing state so as to resume the execution of the recipe when the error is canceled and a recovery operation for resuming the execution of the recipe is performed.
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Specification