MEMS Force Sensors Fabricated Using Paper Substrates
First Claim
1. A micro-electro-mechanical systems (MEMS) device comprising a flexible insulating paper or fabric substrate material.
2 Assignments
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Accused Products
Abstract
MEMS devices fabricated using inexpensive substrate materials such as paper or fabric, are provided. Using paper as a substrate, low cost, simple to prepare, lightweight, disposable piezoresistive sensors, including accelerometers are prepared. Signal-processing circuitry can also be patterned on the substrate material.
The sensors can be utilized as two-dimensional sensors, or the paper substrate material can be folded to arrange the sensors in a three dimensional conformation. For example, three sensors can be patterned on a paper substrate and folded into a cube such that the three sensors are orthogonally positioned on the faces of a cube, permitting simultaneous measurement of accelerations along three orthogonal directions (x-y-z). These paper-based sensors can be mass produced by incorporating highly developed technologies for automatic paper cutting, folding, and screen-printing.
Also provided are methods of modifying paper for use as a substrate material in MEMS devices.
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Citations
20 Claims
- 1. A micro-electro-mechanical systems (MEMS) device comprising a flexible insulating paper or fabric substrate material.
Specification