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MEMS Force Sensors Fabricated Using Paper Substrates

  • US 20140224018A1
  • Filed: 07/25/2012
  • Published: 08/14/2014
  • Est. Priority Date: 08/01/2011
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical systems (MEMS) device comprising a flexible insulating paper or fabric substrate material.

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