ACOUSTIC RESONATOR HAVING TEMPERATURE COMPENSATION
First Claim
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1. An acoustic resonator structure, comprising:
- a substrate having an air cavity;
an acoustic stack disposed over the substrate and comprising a piezoelectric material disposed between a first electrode and a second electrode; and
an acoustic reflector disposed over the substrate and comprising a single pair of acoustic impedance layers configured to reflect acoustic waves produced by vibration of the acoustic stack, wherein at least one of the acoustic impedance layers comprises a temperature compensating material.
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Abstract
An acoustic resonator structure comprises a substrate having an air cavity, an acoustic stack disposed over the substrate and comprising a piezoelectric material disposed between a first electrode and a second electrode, and an acoustic reflector disposed over the substrate and comprising a single pair of acoustic impedance layers configured to reflect acoustic waves produced by vibration of the acoustic stack, wherein at least one of the acoustic impedance layers comprises a temperature compensating material.
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Citations
20 Claims
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1. An acoustic resonator structure, comprising:
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a substrate having an air cavity; an acoustic stack disposed over the substrate and comprising a piezoelectric material disposed between a first electrode and a second electrode; and an acoustic reflector disposed over the substrate and comprising a single pair of acoustic impedance layers configured to reflect acoustic waves produced by vibration of the acoustic stack, wherein at least one of the acoustic impedance layers comprises a temperature compensating material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An acoustic resonator structure, comprising:
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a substrate having an air cavity; an acoustic stack disposed over the substrate and comprising a piezoelectric material disposed between a first electrode and a second electrode; and an acoustic reflector disposed over the substrate and comprising a single acoustic impedance layer formed of a temperature compensating material and configured to reflect acoustic waves produced by vibration of the acoustic stack. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification