HEAT DISSIPATION STRUCTURE, POWER MODULE, METHOD OF MANUFACTURING HEAT DISSIPATION STRUCTURE, AND METHOD OF MANUFACTURING POWER MODULE
First Claim
1. A heat dissipation structure comprising:
- a ceramic substrate having an insulation quality;
a metal member containing a metal or an alloy and joined to a surface of the ceramic substrate by a brazing material;
a metal film layer formed by accelerating a powder containing a metal or an alloy with a gas and by spraying and depositing the powder in a solid phase state on a surface of the metal member; and
a heat pipe that is in a rod shape and capable of controlling a temperature and comprises a heat absorbing unit configured to absorb heat from outside at one end of the heat pipe and a heat dissipating unit configured to dissipate heat to the outside at another end of the heat pipe,wherein the heat absorbing unit is embedded inside the metal film layer.
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Accused Products
Abstract
A heat dissipation structure includes a ceramic substrate having an insulation quality, a metal member containing a metal or an alloy and joined to a surface of the ceramic substrate by a brazing material, a metal film layer formed by accelerating a powder containing a metal or an alloy with a gas and by spraying and depositing the powder in a solid phase state on a surface of the metal member, and a heat pipe that is in a rod shape and capable of controlling a temperature and comprises a heat absorbing unit configured to absorb heat from outside at one end of the heat pipe and a heat dissipating unit configured to dissipate heat to the outside at another end of the heat pipe, wherein the heat absorbing unit is embedded inside the metal film layer.
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Citations
16 Claims
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1. A heat dissipation structure comprising:
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a ceramic substrate having an insulation quality; a metal member containing a metal or an alloy and joined to a surface of the ceramic substrate by a brazing material; a metal film layer formed by accelerating a powder containing a metal or an alloy with a gas and by spraying and depositing the powder in a solid phase state on a surface of the metal member; and a heat pipe that is in a rod shape and capable of controlling a temperature and comprises a heat absorbing unit configured to absorb heat from outside at one end of the heat pipe and a heat dissipating unit configured to dissipate heat to the outside at another end of the heat pipe, wherein the heat absorbing unit is embedded inside the metal film layer. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A power module comprising:
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a ceramic substrate having an insulation quality; a first metal member containing a metal or an alloy and joined to a surface of the ceramic substrate by a brazing material; a metal film layer formed by accelerating a powder containing a metal or an alloy with a gas and by spraying and depositing the powder in a solid phase state on a surface of the first metal member; a heat pipe that is in a rod shape and capable of controlling a temperature and comprises a heat absorbing unit configured to absorb heat from outside at one end of the heat pipe and a heat dissipating unit configured to dissipate heat to the outside at another end of the heat pipe; a second metal member containing a metal or an alloy and joined by the brazing material to a surface, opposing the surface on which the metal film layer is formed, of the ceramic substrate; a circuit layer formed on the second metal member; and a power device mounted on the circuit layer, wherein the heat absorbing unit is embedded inside the metal film layer. - View Dependent Claims (8)
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9. A method of manufacturing a heat dissipation structure, the method comprising:
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metal member joining step for joining a metal member containing a metal or an alloy to a surface of a ceramic substrate having an insulation quality by a brazing material; and film forming step for arranging, on the metal member, a heat pipe that is in a rod shape and capable of controlling a temperature and comprises a heat absorbing unit configured to absorb heat from outside at one end of the heat pipe and a heat dissipating unit configured to dissipate heat to the outside at another end of the heat pipe and forming a metal film layer by accelerating a powder containing a metal or an alloy with a gas and by spraying and depositing the powder in a solid phase state on the metal member on which the heat absorbing unit of the heat pipe is arranged. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method of manufacturing a power module, the method comprising:
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first metal member joining step for joining a first metal member containing a metal or an alloy to a surface of a ceramic substrate having an insulation quality by a brazing material; and film forming step for arranging, on the first metal member, a heat pipe that is in a rod shape and capable of controlling a temperature and comprises a heat absorbing unit configured to absorb heat from outside at one end of the heat pipe and a heat dissipating unit configured to dissipate heat to the outside at another end of the heat pipe and forming a metal film layer by accelerating a powder containing a metal or an alloy with a gas and by spraying and depositing the powder in a solid phase state on the first metal member on which the heat absorbing unit of the heat pipe is arranged; a second metal member joining step for joining a second metal member containing a metal or an alloy by a brazing material to a surface, opposing the surface on which the metal film layer is formed, of the ceramic substrate; circuit layer forming step for forming, on the second metal member, a circuit layer by accelerating a powder containing a metal or an alloy with a gas and by spraying and depositing the powder in a solid phase state on the surface of the second metal member; and power device mounting step for mounting a power device on the circuit layer, wherein the first metal member joining step and the second metal member joining step are simultaneously performed.
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Specification