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MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES

  • US 20140230548A1
  • Filed: 04/30/2014
  • Published: 08/21/2014
  • Est. Priority Date: 11/26/2008
  • Status: Active Grant
First Claim
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1. A device, comprising:

  • a substrate;

    a rectangular frame formed on the substrate, a first side of the frame extending along a first axis and a second side of the frame extending along a second axis that is orthogonal to the first axis;

    a driving assembly elastically coupled to the substrate and positioned within the frame, at least a portion of the driving assembly being configured to move in a plane;

    a first pair of sensing masses coupled to the driving assembly and positioned within the frame, the first pair of sensing masses aligned with each other along a third axis, the third axis being orthogonal to the first axis, the first pair of sensing masses being configured to move out of the plane to detect rotation about the first axis and rotation about the second axis; and

    a second pair of sensing masses coupled to the driving assembly, the second pair of sensing massing aligned with each other along a fourth axis, and the fourth axis being orthogonal to the first axis, the second pair of sensing masses being configured to move out of the plane to detect rotation about the first axis and rotation about the second axis.

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