MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES
First Claim
1. A device, comprising:
- a substrate;
a rectangular frame formed on the substrate, a first side of the frame extending along a first axis and a second side of the frame extending along a second axis that is orthogonal to the first axis;
a driving assembly elastically coupled to the substrate and positioned within the frame, at least a portion of the driving assembly being configured to move in a plane;
a first pair of sensing masses coupled to the driving assembly and positioned within the frame, the first pair of sensing masses aligned with each other along a third axis, the third axis being orthogonal to the first axis, the first pair of sensing masses being configured to move out of the plane to detect rotation about the first axis and rotation about the second axis; and
a second pair of sensing masses coupled to the driving assembly, the second pair of sensing massing aligned with each other along a fourth axis, and the fourth axis being orthogonal to the first axis, the second pair of sensing masses being configured to move out of the plane to detect rotation about the first axis and rotation about the second axis.
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Abstract
An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.
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Citations
19 Claims
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1. A device, comprising:
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a substrate; a rectangular frame formed on the substrate, a first side of the frame extending along a first axis and a second side of the frame extending along a second axis that is orthogonal to the first axis; a driving assembly elastically coupled to the substrate and positioned within the frame, at least a portion of the driving assembly being configured to move in a plane; a first pair of sensing masses coupled to the driving assembly and positioned within the frame, the first pair of sensing masses aligned with each other along a third axis, the third axis being orthogonal to the first axis, the first pair of sensing masses being configured to move out of the plane to detect rotation about the first axis and rotation about the second axis; and a second pair of sensing masses coupled to the driving assembly, the second pair of sensing massing aligned with each other along a fourth axis, and the fourth axis being orthogonal to the first axis, the second pair of sensing masses being configured to move out of the plane to detect rotation about the first axis and rotation about the second axis. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A device, comprising:
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a substrate having a surface that includes a first axis and a second axis perpendicular to the first axis; a central anchor, the first axis and the second axis cross each other at the central anchor; a plurality of driving electrodes on the substrate; a first pair of sensing masses positioned on opposite sides of the central anchor, the first pair of sensing masses being aligned with each other along a third axis that is shifted approximately 45 degrees from the first axis; a second pair of sensing masses positioned on opposite sides of the central anchor, the second pair of sensing massing aligned with each other along a fourth axis that is shifted approximately 45 degrees from the first axis. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A device, comprising:
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a rectangular frame, the frame having a first side that extends substantially parallel to a first axis and a second side that extends substantially parallel to a second axis, the second axis being transverse to the first axis; a central anchorage, the first axis crosses the second axis at the central anchorage; a first pair of suspended sensing electrodes within the frame, the first pair of sensing electrodes being aligned with each other along a third axis that is at a non-zero angle of inclination with respect to the first and the second axis, each sensing electrode of the first pair being configured to detect rotations about the first axis and the second axis; and a second pair of suspended sensing electrodes within the frame, the second pair of sensing electrodes being aligned with each other along a fourth axis that at a non-zero angle of inclination with respect to the first and the second axis, each sensing electrode of the second pair being configured to detect rotations about the first and the second axis. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification