IMAGING DEVICE AND METHOD FOR MANUFACTURING IMAGING DEVICE
First Claim
Patent Images
1. An imaging device comprising:
- a substrate;
lower electrodes formed on the substrate;
an organic layer formed on the lower electrodes and adapted to generate electric charges in response to irradiation with light;
an upper electrode formed on the organic layer and adapted to transmit the light;
a protective film formed on the upper electrode; and
a patterned organic film formed on the protective film,wherein the protective film comprises at least one layer and has a total thickness of 30 to 500 nm,wherein the protective film of a single layer type has an internal stress of −
50 MPa to +60 MPa in a whole of the protective film,wherein in the protective film of a two-layer type including a lower protective film and an upper protective film, the lower protective film has a thickness of 50 nm or less, and when the lower protective film is thinner than the upper protective film, the internal stress in the whole of the protective film satisfies an expression;
−
4.6x−
50≦
y≦
−
1.67x+60 when x is in a range of 0<
x<
15 and satisfies an expression;
−
1.25x−
100≦
y<
0 when x is in a range of 15≦
x≦
50, where the thickness of the lower protective film is denoted by x (nm) and the internal stress in the whole of the protective film is denoted by y (MPa), andwherein, when the lower protective film is thicker than the upper protective film, the internal stress in the whole of the protective film is in a range of 0<
y≦
+115 when x is in a range of 15<
x≦
50.
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Abstract
An imaging device includes a substrate, lower electrodes formed on the substrate, an organic layer formed on the lower electrodes and generating electric charges in response to irradiation with light, an upper electrode formed on the organic layer and transmitting the light, a protective film formed on the upper electrode, and a patterned organic film formed on the protective film. The protective film is composed of at least one layer and has a total thickness of 30 to 500 nm. The protective film of a single layer type has an internal stress of −50 MPa to +60 MPa in the whole of the protective film.
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Citations
18 Claims
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1. An imaging device comprising:
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a substrate; lower electrodes formed on the substrate; an organic layer formed on the lower electrodes and adapted to generate electric charges in response to irradiation with light; an upper electrode formed on the organic layer and adapted to transmit the light; a protective film formed on the upper electrode; and a patterned organic film formed on the protective film, wherein the protective film comprises at least one layer and has a total thickness of 30 to 500 nm, wherein the protective film of a single layer type has an internal stress of −
50 MPa to +60 MPa in a whole of the protective film,wherein in the protective film of a two-layer type including a lower protective film and an upper protective film, the lower protective film has a thickness of 50 nm or less, and when the lower protective film is thinner than the upper protective film, the internal stress in the whole of the protective film satisfies an expression;
−
4.6x−
50≦
y≦
−
1.67x+60 when x is in a range of 0<
x<
15 and satisfies an expression;
−
1.25x−
100≦
y<
0 when x is in a range of 15≦
x≦
50, where the thickness of the lower protective film is denoted by x (nm) and the internal stress in the whole of the protective film is denoted by y (MPa), andwherein, when the lower protective film is thicker than the upper protective film, the internal stress in the whole of the protective film is in a range of 0<
y≦
+115 when x is in a range of 15<
x≦
50. - View Dependent Claims (2, 4, 5, 6, 7, 8, 10, 11, 13, 14)
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3. An imaging device comprising:
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a substrate; lower electrodes formed on the substrate; an organic layer formed on the lower electrodes and adapted to generate electric charges in response to irradiation with light; an upper electrode formed on the organic layer and adapted to transmit the light; a protective film formed on the upper electrode; and a patterned organic film formed on the protective film, wherein the protective film comprises two layers including a lower protective film and an upper protective film and has a total thickness of 30 to 500 nm, wherein the lower protective film has a thickness of at least 15 nm but 50 nm or less, wherein, when the lower protective film is thinner than the upper protective film, an internal stress in a whole of the protective film satisfies an expression;
−
1.25x−
100≦
y<
0, where the thickness of the lower protective film is denoted by x (nm) and the internal stress in the whole of the protective film is denoted by y (MPa), andwherein, when the lower protective film is thicker than the upper protective film, the internal stress in the whole of the protective film is in a range of 0<
y≦
+115 when x is in a range of 15<
x≦
50. - View Dependent Claims (9, 12)
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15. An imaging device comprising:
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a substrate; lower electrodes formed on the substrate; an organic layer formed on the lower electrodes and adapted to generate electric charges in response to irradiation with light; an upper electrode formed on the organic layer and adapted to transmit the light; a protective film formed on the upper electrode; a patterned organic film formed on the protective film; and an organic thin film formed by coating between the protective film and the patterned organic film, wherein the protective film comprises at least one layer and has a total thickness of 30 to 500 nm. - View Dependent Claims (16, 17)
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18. A method for manufacturing an imaging device comprising:
- a substrate;
lower electrodes formed on the substrate;
an organic layer formed on the lower electrodes and adapted to generate electric charges in response to irradiation with light;
an upper electrode formed on the organic layer and adapted to transmit the light;
a protective film formed on the upper electrode; and
a patterned organic film formed on the protective film,the protective film comprising a lower protective film formed on the upper electrode and an upper protective film formed on the lower protective film, the method comprising; a step of forming the lower protective film at a substrate temperature of 100°
C. to 200°
C. using an atomic layer deposition process; anda step of forming the upper protective film at a substrate temperature of 150°
C. to 250°
C. using a plasma CVD process.
- a substrate;
Specification