MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES
First Claim
1. A MEMS structure comprising:
- a first set of wires on a substrate, comprising fixed actuator electrodes and a contact;
a MEMS beam comprising a second set of wires above the first set of wires; and
an array of mini-bumps between the first set of wires and the second set of wires, wherein the array of mini-bumps prevent portions of the second set of wires from contacting the fixed actuator electrodes, upon actuation.
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Accused Products
Abstract
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.
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Citations
16 Claims
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1. A MEMS structure comprising:
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a first set of wires on a substrate, comprising fixed actuator electrodes and a contact; a MEMS beam comprising a second set of wires above the first set of wires; and an array of mini-bumps between the first set of wires and the second set of wires, wherein the array of mini-bumps prevent portions of the second set of wires from contacting the fixed actuator electrodes, upon actuation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A MEMS structure, comprising:
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fixed actuator electrodes and a contact point; a MEMS beam over the fixed actuator electrodes and the contact point; and an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from contacting an actuator portion of the fixed actuator electrodes, wherein the array of actuator electrodes are in direct contact with and extending from at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes. - View Dependent Claims (13, 14, 15)
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16. A hardware description language (HDL) design structure tangibly embodied in a machine-readable data storage medium, said HDL design structure comprising elements that when processed in a computer-aided design system comprising at least a hardware component that generates a machine-executable representation of a MEMS structure, wherein said HDL design structure comprises:
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a first set of wires on a substrate, comprising fixed actuator electrodes and a contact; a second set of wires above the first set of wires; and an array of mini-bumps between the first set of wires and the second set of wires, wherein the array of mini-bumps prevent portions of the second set of wires from contacting the fixed actuator electrodes, upon actuation.
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Specification