ADJUSTABLE NON-DISSIPATIVE VOLTAGE BOOSTING SNUBBER NETWORK FOR ACHIEVING LARGE BOOST VOLTAGES
First Claim
1. A pulsed DC power supply system that provides pulsed DC power to a plurality of anodeless electrodes sustaining a plasma in a plasma processing chamber, the pulsed DC power supply system comprising:
- a DC power supply coupled to and providing a first DC power to a first and second rail, such that a rail voltage exists across the first and second rails;
a switching circuit coupled to the first and second rails and receiving the first DC power via the first and second rails and converting the first DC power to a first pulsed DC voltage configured for delivery to at least a first anodeless electrode of the plasma processing chamber; and
a voltage-boosting circuit coupled between the first and second rails, the voltage-boosting circuit comprising;
a first diode coupled between the first rail and a first electrical node and forward biased when a voltage measured from the first rail to the first electrical node is sufficiently positive to forward bias the first diode;
a capacitive element coupled between the first electrical node and the second rail;
a switch selectively coupling the first electrical node and a second electrical node;
a second diode coupled between the second rail and the second electrical node and forward biased when a voltage measured from the second rail to the second electrical node is sufficiently positive to forward bias the second electrical node; and
an inductive element coupled between the second electrical node and the first rail.
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Accused Products
Abstract
This disclosure describes a non-dissipative snubber circuit configured to boost a voltage applied to a load after the load'"'"'s impedance rises rapidly. The voltage boost can thereby cause more rapid current ramping after a decrease in power delivery to the load which results from the load impedance rise. In particular, the snubber can comprise a combination of a unidirectional switch, a voltage multiplier, and a current limiter. In some cases, these components can be a diode, voltage doubler, and an inductor, respectively.
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Citations
23 Claims
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1. A pulsed DC power supply system that provides pulsed DC power to a plurality of anodeless electrodes sustaining a plasma in a plasma processing chamber, the pulsed DC power supply system comprising:
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a DC power supply coupled to and providing a first DC power to a first and second rail, such that a rail voltage exists across the first and second rails; a switching circuit coupled to the first and second rails and receiving the first DC power via the first and second rails and converting the first DC power to a first pulsed DC voltage configured for delivery to at least a first anodeless electrode of the plasma processing chamber; and a voltage-boosting circuit coupled between the first and second rails, the voltage-boosting circuit comprising; a first diode coupled between the first rail and a first electrical node and forward biased when a voltage measured from the first rail to the first electrical node is sufficiently positive to forward bias the first diode; a capacitive element coupled between the first electrical node and the second rail; a switch selectively coupling the first electrical node and a second electrical node; a second diode coupled between the second rail and the second electrical node and forward biased when a voltage measured from the second rail to the second electrical node is sufficiently positive to forward bias the second electrical node; and an inductive element coupled between the second electrical node and the first rail. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A pulsed DC power supply system configured to provide pulsed DC power to a plurality of anodeless electrodes of a plasma processing chamber, the pulsed DC power supply comprising:
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a pulsed DC power supply system coupled to and providing a DC current via a first and second rail; a voltage-boosting circuit coupled between the first and second rail and comprising; a first diode coupled between the first rail and a first electrical node, an anode of the first diode being at a voltage of the first rail; a voltage multiplier coupled between the second rail and the first electrical node, the voltage multiplier having an output; a first inductive element coupled between the first rail and a second electrical node; a first switch coupled between the first and second electrical nodes and selectively discharging a portion of a voltage stored in the voltage multiplier through the first inductive element to the first rail; a second diode coupled between the first rail and a third electrical node, an anode of the second diode being at a voltage of the third electrical node; and a second inductive element being coupled between the output of the voltage multiplier and the third electrical node; a switching circuit coupled to the first and second rails and receiving the DC current via the first and second rails and generating a pulsed DC voltage, the switching circuit having first and second outputs configured to provide the first pulsed DC voltage to at least first and second anodeless electrodes of the plasma processing chamber. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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15. A method of operating a voltage-boosting circuit arranged between a first and second rail carrying DC current to a switching circuit that converts DC current on the first and second rails to a pulsed DC voltage and provides the pulsed DC voltage across a plasma load of a plasma processing chamber, the method comprising:
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providing a rail voltage VAB between the first and second rails equal to a process voltage V1; absorbing some of the DC current in a capacitive element when an impedance of the plasma load increases sufficiently to forward bias a diode coupled between the first rail and a first electrical node, the capacitive element being coupled between the second rail and the first electrical node; raising the rail voltage VAB to greater than twice the process voltage V1 as a result of the absorbing; closing a switch coupled between the first electrical node and a second electrical node after the raising; lowering the rail voltage VAB to the process voltage V1 as a result of the closing; and discharging, during the lowering, at least a portion of charge stored in the capacitive element through the switch and an inductive element, the inductive element being coupled between the first rail and the second electrical node. - View Dependent Claims (16, 17)
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18. A method of operating a voltage-boosting circuit arranged between a first and second rail carrying DC current to a switching circuit that converts DC current on the first and second rails to a pulsed DC voltage and provides the pulsed DC voltage across a plasma load of a plasma processing chamber, the method comprising:
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absorbing in a voltage multiplier some of the DC current when an impedance of the plasma load substantially increases; discharging to the switching circuit at least some energy stored in the voltage multiplier from the absorbed DC current, and thereby boosting a voltage of the DC current; monitoring a voltage across a capacitive element of the voltage multiplier that absorbs some of the DC current; closing the switch when the voltage exceeds a maximum voltage threshold; reducing the voltage across the capacitive element as a result of the closing until the voltage falls below a minimum voltage threshold; and
thenopening the switch when the voltage falls below the minimum voltage threshold; and increasing the voltage across the capacitive element as a result of the opening. - View Dependent Claims (19, 20, 21, 22, 23)
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Specification