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ADJUSTABLE NON-DISSIPATIVE VOLTAGE BOOSTING SNUBBER NETWORK FOR ACHIEVING LARGE BOOST VOLTAGES

  • US 20140232266A1
  • Filed: 02/20/2014
  • Published: 08/21/2014
  • Est. Priority Date: 11/01/2012
  • Status: Active Grant
First Claim
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1. A pulsed DC power supply system that provides pulsed DC power to a plurality of anodeless electrodes sustaining a plasma in a plasma processing chamber, the pulsed DC power supply system comprising:

  • a DC power supply coupled to and providing a first DC power to a first and second rail, such that a rail voltage exists across the first and second rails;

    a switching circuit coupled to the first and second rails and receiving the first DC power via the first and second rails and converting the first DC power to a first pulsed DC voltage configured for delivery to at least a first anodeless electrode of the plasma processing chamber; and

    a voltage-boosting circuit coupled between the first and second rails, the voltage-boosting circuit comprising;

    a first diode coupled between the first rail and a first electrical node and forward biased when a voltage measured from the first rail to the first electrical node is sufficiently positive to forward bias the first diode;

    a capacitive element coupled between the first electrical node and the second rail;

    a switch selectively coupling the first electrical node and a second electrical node;

    a second diode coupled between the second rail and the second electrical node and forward biased when a voltage measured from the second rail to the second electrical node is sufficiently positive to forward bias the second electrical node; and

    an inductive element coupled between the second electrical node and the first rail.

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