ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION METHOD, AND LIGHT POLARIZATION UNIT
First Claim
1. An illumination optical system which illuminates an illumination objective surface with a light from a light source, the illumination optical system comprising:
- a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in a variable manner in an illumination pupil of the illumination optical system; and
a polarization unit which is arranged in a conjugate position optically conjugate with the predetermined plane in an optical path of the illumination optical system, and which polarizes an incident light beam having a first partial light beam and a second partial light beam different from the first partial light beam, coming into the polarization unit such that the first partial light beam and the second partial light beam have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam,wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional area of the first partial light beam and a cross sectional area of the second partial light beam.
1 Assignment
0 Petitions
Accused Products
Abstract
An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
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Citations
55 Claims
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1. An illumination optical system which illuminates an illumination objective surface with a light from a light source, the illumination optical system comprising:
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a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in a variable manner in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a conjugate position optically conjugate with the predetermined plane in an optical path of the illumination optical system, and which polarizes an incident light beam having a first partial light beam and a second partial light beam different from the first partial light beam, coming into the polarization unit such that the first partial light beam and the second partial light beam have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional area of the first partial light beam and a cross sectional area of the second partial light beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 55)
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48. A polarization unit which changes a polarization state of a part of an incident light beam having a rectangular cross section and then emits the incident light beam as an outgoing light beam, the polarization unit comprising:
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a first optical element which is arranged on a first plane along the cross section of the incident light beam and which changes a polarization state of a second partial light beam in the incident light beam, without exerting any effect on a first partial light beam in the incident light beam; and a second optical element which is arranged on a second plane along the cross section of the incident light beam and which changes a polarization state of a third partial light beam which is at least a part of the second partial light beam passed through the first optical element, and a polarization state of a fourth partial light beam which is at least a part of the first partial light beam which coming into the second optical element without passing through the first optical element, wherein the first optical element has a first edge extending in a first direction obliquely intersecting one pair of sides of the rectangular cross section of the incident light beam, and a second edge extending in a second direction different from the first direction. - View Dependent Claims (49, 50, 51, 52, 53, 54)
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Specification