VANADIUM DIOXIDE MICROACTUATORS
First Claim
Patent Images
1. A method comprising:
- (a) depositing a vanadium dioxide layer on a sacrificial layer disposed on a substrate;
(b) depositing a metal layer on the vanadium dioxide layer;
(c) patterning the metal layer;
(d) removing portions of the vanadium dioxide layer that are not covered by the metal layer; and
(e) removing at least a portion of the sacrificial layer to form a cantilever-type structure including the vanadium dioxide layer and the metal layer disposed on the vanadium dioxide layer.
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Abstract
This disclosure provides systems, methods, and apparatus related to vanadium dioxide microactuators. In one aspect, a method includes depositing a vanadium dioxide layer on a sacrificial layer disposed on a substrate. A metal layer is deposited on the vanadium dioxide layer. The metal layer is patterned. Portions of the vanadium dioxide layer that are not covered by the metal layer are removed. At least a portion of the sacrificial layer is removed to form a cantilever-type structure including the vanadium dioxide layer and the metal layer disposed on the vanadium dioxide layer.
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Citations
20 Claims
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1. A method comprising:
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(a) depositing a vanadium dioxide layer on a sacrificial layer disposed on a substrate; (b) depositing a metal layer on the vanadium dioxide layer; (c) patterning the metal layer; (d) removing portions of the vanadium dioxide layer that are not covered by the metal layer; and (e) removing at least a portion of the sacrificial layer to form a cantilever-type structure including the vanadium dioxide layer and the metal layer disposed on the vanadium dioxide layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14)
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13. A device comprising:
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a vanadium dioxide layer; a metal layer disposed on the vanadium dioxide layer, the vanadium dioxide layer and the metal layer forming a pattern including a first electrode, a second electrode, and a line, a first end of the line connected to the first electrode and the second end of the line connected to the second electrode, the line forming a U-shaped pattern; a substrate; and an sacrificial layer disposed on a portion of the substrate, the vanadium dioxide layer of the first electrode, the second electrode, a first portion of the line forming the U-shaped pattern being disposed on the sacrificial layer, and a second portion of the line forming the U-shaped pattern being in free space. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification