FinFETs and Methods for Forming the Same
First Claim
Patent Images
1. A structure comprising:
- a substrate comprising a fin, the fin having a major surface portion of a sidewall, the major surface portion comprising at least one lattice shift, wherein the at least one lattice shift comprises an inward or outward shift relative to a center of the fin;
a gate dielectric on the major surface portion of the sidewall, the gate dielectric contacting the sidewall on at least a portion of the at least one lattice shift; and
a gate electrode on the gate dielectric.
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Abstract
A finFET and methods for forming a finFET are disclosed. A structure comprises a substrate, a fin, a gate dielectric, and a gate electrode. The substrate comprises the fin. The fin has a major surface portion of a sidewall, and the major surface portion comprises at least one lattice shift. The at least one lattice shift comprises an inward or outward shift relative to a center of the fin. The gate dielectric is on the major surface portion of the sidewall. The gate electrode is on the gate dielectric.
74 Citations
28 Claims
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1. A structure comprising:
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a substrate comprising a fin, the fin having a major surface portion of a sidewall, the major surface portion comprising at least one lattice shift, wherein the at least one lattice shift comprises an inward or outward shift relative to a center of the fin; a gate dielectric on the major surface portion of the sidewall, the gate dielectric contacting the sidewall on at least a portion of the at least one lattice shift; and a gate electrode on the gate dielectric. - View Dependent Claims (2, 3, 4, 5, 6, 21)
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7. A structure comprising:
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a fin on a substrate; a gate dielectric adjoining atoms in multiple parallel planes on a major surface portion of a sidewall of the fin, the multiple parallel planes being perpendicular to a major surface of the substrate, neighboring pairs of the multiple parallel planes being separated by at least one lattice constant, a first group of the atoms being in a first one of the multiple parallel planes, a second group of the atoms being in a second one of the multiple parallel planes; and a gate electrode on the gate dielectric. - View Dependent Claims (8, 9, 10, 11, 12, 22)
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13-20. -20. (canceled)
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23. A structure comprising:
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a fin on a substrate, the fin having a major surface portion of a sidewall, the major surface portion comprising at least one lattice shift, the at least one lattice shift comprising an inward shift relative to a center of the fin, an outward shift relative to the center of the fin, or a combination thereof; a gate dielectric on the major surface portion of the sidewall; a gate electrode on the gate dielectric; and an isolation region in the substrate and proximate the fin, the at least one lattice shift being above the isolation region. - View Dependent Claims (24, 25, 26, 27, 28)
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Specification