HEATED SUBSTRATE SUPPORT WITH FLATNESS CONTROL
First Claim
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1. A heated substrate support, comprising:
- a support plate having a top surface and an opposite bottom surface; and
a first heater disposed within the support plate, wherein the first heater is disposed beneath a mid-plane of the support plate, and wherein the first heater is disposed proximate a central zone of the support plate.
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Abstract
Embodiments of heated substrate supports are provided herein, In some embodiments, a heated substrate support includes a support plate having a top surface and an opposite bottom surface; and a first heater disposed within the support plate, wherein the first heater is disposed beneath a mid-plane of the support plate, and wherein the first heater is disposed proximate a central zone of the support plate.
46 Citations
20 Claims
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1. A heated substrate support, comprising:
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a support plate having a top surface and an opposite bottom surface; and a first heater disposed within the support plate, wherein the first heater is disposed beneath a mid-plane of the support plate, and wherein the first heater is disposed proximate a central zone of the support plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A heated substrate support, comprising:
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a support plate having a top surface and an opposite bottom surface; a shaft coaxial with the support plate and coupled to the bottom surface; a first heater disposed within a central zone of the support plate beneath a mid-plane of the support plate; a second heater disposed within a second zone of the support plate beneath the mid-plane of the support plate; a first sensor to provide data corresponding to a temperature in the central zone; and a second sensor to provide data corresponding to a temperature in the second zone. - View Dependent Claims (16, 17, 18)
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19. A method for controlling the flatness of a substrate support, comprising:
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energizing a heater element disposed within a support plate of the substrate support and beneath a mid-plane of the support plate; sensing a temperature of a central zone within the support plate; comparing the temperature of the central zone with a predetermined temperature corresponding to a thermal expansion of a portion of the support plate; and deenergizing the heater element if the sensed temperature is equal to or greater than the predetermined temperature. - View Dependent Claims (20)
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Specification