PLASMA PROCESSING APPARATUS

• US 20140251541A1
• Filed: 03/07/2014
• Published: 09/11/2014
• Est. Priority Date: 03/08/2013
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: NOZAWA, Toshihisa, IWAO, Toshihiko
• Application Number:
  US14/200,386
• Publication Number:
  US 20140251541A1
• Time in Patent Office: Days
• US Class Current: 156/345.41
• CPC Class Codes: H01J 37/32229 Waveguides
• CPC Class Codes: H01J 37/32293 using particular waveforms, e.g. polarised waves

Abstract

Disclosed is a plasma processing apparatus including: a processing container having a cylindrical columnar shape centering around a predetermined axis and defining a processing space therein; a plurality of columnar dielectric bodies installed at a top side of the processing space; a microwave generator configured to generate microwaves; a waveguide unit configured to connect the microwave generator and the plurality of columnar dielectric bodies; and a stage installed within the processing container to intersect with the predetermined axis. The plurality of columnar dielectric bodies are arranged at predetermined intervals along a circumferential direction around the predetermined axis within the processing space. The waveguide unit branches microwaves input from the microwave generator and supplies the branched microwaves to the plurality of columnar dielectric bodies.

Claims

1. A plasma processing apparatus comprising:

a processing container having a cylindrical columnar shape centering around a predetermined axis and defining a processing space therein;

a plurality of columnar dielectric bodies installed at a top side of the processing space;

a microwave generator configured to generate microwaves;

a waveguide unit configured to connect the microwave generator and the plurality of columnar dielectric bodies; and

a stage installed within the processing container to intersect with the predetermined axis,

wherein the plurality of columnar dielectric bodies are arranged at predetermined intervals along a circumferential direction around the predetermined axis within the processing space, and

the waveguide unit branches microwaves input from the microwave generator and supplies the branched microwaves to the plurality of columnar dielectric bodies.

2. The plasma processing apparatus of claim 1, wherein the processing container includes a side wall configured to determine the processing space from a lateral side, the side wall being formed with a plurality of openings along the circumferential direction around the predetermined axis, and

the plurality of columnar dielectric bodies extend to the inside of the processing container through the plurality of openings.

3. The plasma processing apparatus of claim 1, wherein the processing container includes a top wall that defines the processing space from the top side, the top wall being formed with a plurality of openings in the circumferential direction around the predetermined axis, and

the plurality of columnar dielectric bodies extend in a direction parallel to the predetermined axis through the plurality of openings.

4. The plasma processing apparatus of claim 1, wherein the waveguide unit includes a branching adjustment mechanism configured to adjust a branching ratio of the microwaves.

5. The plasma processing apparatus of claim 1, wherein the columnar dielectric bodies are made of quartz and each of the columnar dielectric bodies is formed in a cylindrical columnar shape having a diameter of 35 mm to 45 mm.

6. The plasma processing apparatus of claim 1, wherein the columnar dielectric bodies are made of alumina and each of the columnar dielectric bodies is formed in a cylindrical columnar shape having a diameter of 23 mm to 30 mm.