SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
First Claim
1. A semiconductor device, comprising a substrate and thin film transistors supported by the substrate,wherein the thin film transistors each include an oxide semiconductor layer, a gate electrode, a source electrode, a drain electrode, and a metal oxide layer formed between at least either of the source electrode and the oxide semiconductor layer, or the drain electrode and the oxide semiconductor layer,wherein the metal oxide layer includes a metal element that is included in at least one of the source electrode and the drain electrode, andwherein a thickness T1 of the oxide semiconductor layer, a thickness T2 of the metal oxide layer, and a distance D between the source electrode and the drain electrode satisfy D≧
- 1.56×
(T2/T1)+0.75.
1 Assignment
0 Petitions
Accused Products
Abstract
The semiconductor device (100A) according to the present invention has a thin film transistor (10A1) supported on a substrate; the thin film transistor (10A1) has an oxide semiconductor layer (5a1), a gate electrode (3a1), a source electrode (8a1), a drain electrode (9a1), and a metal oxide layer (6a, 7a) formed between the source electrode (8a1) and the oxide semiconductor layer (5a1) and/or between the drain electrode (9a1) and the oxide semiconductor layer (5a1); the metal oxide layer (6a, 7a) contains a metallic element included in the source electrode (8a1) and/or the drain electrode (9a1); and the thickness T1 of the oxide semiconductor layer, the thickness T2 of the metal oxide layer, and the distance D between the source electrode (8a1) and the drain electrode (9a1) satisfy the relationship D≧1.56×(T2/T1)+0.75.
-
Citations
23 Claims
-
1. A semiconductor device, comprising a substrate and thin film transistors supported by the substrate,
wherein the thin film transistors each include an oxide semiconductor layer, a gate electrode, a source electrode, a drain electrode, and a metal oxide layer formed between at least either of the source electrode and the oxide semiconductor layer, or the drain electrode and the oxide semiconductor layer, wherein the metal oxide layer includes a metal element that is included in at least one of the source electrode and the drain electrode, and wherein a thickness T1 of the oxide semiconductor layer, a thickness T2 of the metal oxide layer, and a distance D between the source electrode and the drain electrode satisfy D≧ - 1.56×
(T2/T1)+0.75. - View Dependent Claims (2, 4, 5, 6, 7, 8)
- 1.56×
-
3. A semiconductor device, comprising a substrate and thin film transistors supported by the substrate,
wherein the thin film transistors each include an oxide semiconductor layer, a gate electrode, a source electrode, a drain electrode, and a metal oxide layer formed between at least either of the source electrode and the oxide semiconductor layer, or the drain electrode and the oxide semiconductor layer, wherein the metal oxide layer includes a metal element that is included in at least one of the source electrode and the drain electrode, and wherein a thickness T1 of the oxide semiconductor layer and a thickness T2 of the metal oxide layer satisfy 0.21≦ - (T2/T1)≦
0.57. - View Dependent Claims (17, 18, 19, 20, 21)
- (T2/T1)≦
-
9. A method of manufacturing a semiconductor device, comprising:
-
(A) forming a gate electrode on a substrate; (B) forming a gate insulating film so as to cover the gate electrode; (C) forming an oxide semiconductor layer on the gate insulating film; (D) forming a source electrode and a drain electrode so as to be in contact with the oxide semiconductor layer; (E) forming a protective film so as to cover the source electrode and the drain electrode; and (F) forming a metal oxide layer on at least one of an area between the source electrode and the oxide semiconductor layer and an area between the drain electrode and the oxide semiconductor layer, by performing annealing, wherein a thickness T1 of the oxide semiconductor layer, a thickness T2 of the metal oxide layer, and a distance D between the source electrode and the drain electrode satisfy D≧
1.56×
(T2/T1)+0.75. - View Dependent Claims (10, 12, 13, 22, 23)
-
-
11. (canceled)
-
14-16. -16. (canceled)
Specification