SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING THE SAME

• US 20140252389A1
• Filed: 09/16/2013
• Published: 09/11/2014
• Est. Priority Date: 03/05/2013
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: KOIZUMI, Hiroshi, NAKA, Tomomichi
• Granted Patent: US 8,890,199 B2
• Time in Patent Office: Days
• US Class Current: 257/98
• CPC Class Codes: H01L 2933/0041 relating to wavelength conversion elements
• CPC Class Codes: H01L 33/005 Processes
• CPC Class Codes: H01L 33/0093 Wafer bonding; Removal of the growth substrate
• CPC Class Codes: H01L 33/501 characterised by the materials, e.g. binder
• CPC Class Codes: H01L 33/504 Elements with two or more wavelength conversion materials
• CPC Class Codes: H01L 33/58 Optical field-shaping elements

Abstract

According to one embodiment, a method for manufacturing a semiconductor light emitting device is disclosed. The method can include applying a resin liquid onto a first major surface of a workpiece. The workpiece has the first major surface and includes a plurality of element units and a resin layer holding the plurality of element units. The method causes the particles in the resin liquid to sink and forms a first region on a surface side of the resin liquid and a second region provided between the first region and the workpiece. The method raises a temperature of the workpiece to a second temperature higher than the first temperature to cure the resin liquid to form an optical layer including a first portion and a second portion. In addition, the method divides the optical layer and the resin layer for the plurality of element units.

Claims

1. A method for manufacturing a semiconductor light emitting device comprising:

applying a resin liquid onto a first major surface of a workpiece,

the workpiece having the first major surface and including a plurality of element units aligned in a plane parallel to the first major surface and a resin layer holding the plurality of element units,

each of the plurality of element units including;

a conductive first columnar unit extending in a first direction perpendicular to the first major surface;

a conductive second columnar unit provided apart from the first columnar unit in a second direction parallel to the first major surface and extending in the first direction; and

a light emitting unit including;

a first semiconductor layer of a first conductivity type including a first semiconductor portion opposed to at least part of the first columnar unit and a second semiconductor portion opposed to at least part of the second columnar unit;

a second semiconductor layer of a second conductivity type provided between the second columnar unit and the second semiconductor portion; and

a light emitting layer provided between the second semiconductor portion and the second semiconductor layer,

the resin liquid including a light transmissive resin and a plurality of particles dispersed in the light transmissive resin and configured to absorb at least part of a first light emitted from the light emitting layer and emit a second light of a wavelength different from a wavelength of the first light;

causing the plurality of particles in the resin liquid to sink while keeping a state where a temperature of the workpiece on which the resin liquid is applied is raised to a first temperature and forming a first region on a surface side of the resin liquid and a second region provided between the first region and the workpiece and including the particle in a concentration higher than a concentration of the particle in the first region;

raising a temperature of the workpiece on which the first region and the second region are formed to a second temperature higher than the first temperature to cure the resin liquid to form an optical layer including a first portion and a second portion, the first portion being formed from the first region, the second portion being formed from the second region and including the particle at a concentration higher than a concentration of the particle in the first portion, there being no seam between the first portion and the second portion; and

dividing the optical layer and the resin layer for the plurality of element units.

2. The method according to claim 1, wherein a thickness of the second portion is 200 micrometers or less.

3. The method according to claim 1, wherein the light transmissive resin includes at least one of a silicone-based resin, an acrylic-based resin, and an epoxy-based resin.

4. The method according to claim 1, wherein

the optical layer further includes a plurality of fillers dispersed in the light transmissive resin and

the filler includes at least one of silicon oxide, aluminum oxide, and titanium oxide.

5. The method according to claim 1, wherein

a concentration of the particle in the first portion is 5% or less and

a concentration of the particle in the second portion is not less than 40% and not more than 95%.

6. The method according to claim 1, wherein

a thickness of the first portion is not less than 20 micrometers and not more than 100 micrometers and

the thickness of the second portion is 40 micrometers or more.

7. The method according to claim 1, wherein the thickness of the second portion is not less than 70 micrometers and not more than 80 micrometers.

8. A method for manufacturing a semiconductor light emitting device comprising:

disposing a structure body on a first major surface of a workpiece, the structure body lying along an edge of the first major surface,

the workpiece having the first major surface and including a plurality of element units aligned in a plane parallel to the first major surface and a resin layer holding the plurality of element units,

each of the plurality of element units including;

a conductive first columnar unit extending in a first direction perpendicular to the first major surface;

a conductive second columnar unit provided apart from the first columnar unit in a second direction parallel to the first major surface and extending in the first direction; and

a light emitting unit including;

a first semiconductor layer of a first conductivity type including a first semiconductor portion opposed to at least part of the first columnar unit and a second semiconductor portion opposed to at least part of the second columnar unit;

a second semiconductor layer of a second conductivity type provided between the second columnar unit and the second semiconductor portion; and

a light emitting layer provided between the second semiconductor portion and the second semiconductor layer;

applying a resin liquid onto a region surrounded by the structure body of the first major surface, the resin liquid including a light transmissive resin and a plurality of particles dispersed in the light transmissive resin and configured to absorb at least part of a first light emitted from the light emitting layer and emit a second light of a wavelength different from a wavelength of the first light;

applying centrifugal force to the workpiece on which the resin liquid is applied and changing a distribution of the plurality of particles in the resin liquid to form a first region on a surface side of the resin liquid and a second region provided between the first region and the workpiece and including the particle at a concentration higher than a concentration of the particle in the first region;

curing the resin liquid to form an optical layer including a first portion and a second portion, the first portion being formed from the first region, the second portion being formed from the second region and including the particle at a concentration higher than a concentration of the particle in the first portion, there being no seam between the first portion and the second portion; and

dividing the optical layer and the resin layer for the plurality of element units,

wherein a thickness of the second portion is 200 micrometers or less.

10. The method according to claim 8, wherein the light transmissive resin includes at least one of a silicone-based resin, an acrylic-based resin, and an epoxy-based resin.

11. The method according to claim 8, wherein

the optical layer further includes a plurality of fillers dispersed in the light transmissive resin and

the filler includes at least one of silicon oxide, aluminum oxide, and titanium oxide.

12. The method according to claim 8, wherein

a concentration of the particle in the first portion is 5% or less and

a concentration of the particle in the second portion is not less than 40% and not more than 95%.

14. The method according to claim 8,

wherein the thickness of the second portion is not less than 70 micrometers and not more than 80 micrometers.

9. (canceled)

13. A method for manufacturing a semiconductor light emitting device comprising:

disposing a structure body on a first major surface of a workpiece, the structure body lying along an edge of the first major surface,

the workpiece having the first major surface and including a plurality of element units aligned in a plane parallel to the first major surface and a resin layer holding the plurality of element units,

each of the plurality of element units including;

a conductive first columnar unit extending in a first direction perpendicular to the first major surface;

a conductive second columnar unit provided apart from the first columnar unit in a second direction parallel to the first major surface and extending in the first direction; and

a light emitting unit including;

a first semiconductor layer of a first conductivity type including a first semiconductor portion opposed to at least part of the first columnar unit and a second semiconductor portion opposed to at least part of the second columnar unit;

a second semiconductor layer of a second conductivity type provided between the second columnar unit and the second semiconductor portion; and

a light emitting layer provided between the second semiconductor portion and the second semiconductor layer;

applying a resin liquid onto a region surrounded by the structure body of the first major surface, the resin liquid including a light transmissive resin and a plurality of particles dispersed in the light transmissive resin and configured to absorb at least part of a first light emitted from the light emitting layer and emit a second light of a wavelength different from a wavelength of the first light;

applying centrifugal force to the workpiece on which the resin liquid is applied and changing a distribution of the plurality of particles in the resin liquid to form a first region on a surface side of the resin liquid and a second region provided between the first region and the workpiece and including the particle at a concentration higher than a concentration of the particle in the first region;

curing the resin liquid to form an optical layer including a first portion and a second portion, the first portion being formed from the first region, the second portion being formed from the second region and including the particle at a concentration higher than a concentration of the particle in the first portion, there being no seam between the first portion and the second portion; and

dividing the optical layer and the resin layer for the plurality of element units,

wherein a thickness of the first portion is not less than 20 micrometers and not more than 100 micrometers and

the thickness of the second portion is 40 micrometers or more.

15. A semiconductor light emitting device comprising:

a conductive first columnar unit extending in a first direction;

a conductive second columnar unit provided apart from the first columnar unit in a second direction crossing the first direction and extending in the first direction;

an optical layer provided apart from the first columnar unit and the second columnar unit in the first direction;

a light emitting unit including;

a first semiconductor layer of a first conductivity type including;

a first semiconductor portion provided between at least part of the first columnar unit and the optical layer; and

a second semiconductor portion provided between the second columnar unit and the optical layer;

a second semiconductor layer of a second conductivity type provided between the second columnar unit and the second semiconductor portion; and

a light emitting layer provided between the second semiconductor portion and the second semiconductor layer; and

a resin unit covering a side surface along the first direction of the first columnar unit, a side surface along the first direction of the second columnar unit, a side surface of the light emitting unit, and a surface on a side of the first columnar unit and the second columnar unit of the light emitting unit,

the optical layer including a light transmissive resin and a plurality of particles dispersed in the light transmissive resin and configured to absorb at least part of a first light emitted from the light emitting layer and emit a second light of a wavelength different from a wavelength of the first light,

the optical layer including a first portion and a second portion provided between the first portion and the first semiconductor layer and including the particle at a concentration higher than a concentration of the particle in the first portion,

there being no seam between the first portion and the second portion,

wherein a thickness of the second portion is 200 micrometers or less.

17. The device according to claim 15, wherein the light transmissive resin contains includes at least one of a silicone-based resin, an acrylic-based resin, and an epoxy-based resin.

20. The device according to claim 15,

wherein the thickness of the second portion is not less than 70 micrometers and not more than 80 micrometers.

16. (canceled)

18. A semiconductor light emitting device comprising:

a conductive first columnar unit extending in a first direction;

a conductive second columnar unit provided apart from the first columnar unit in a second direction crossing the first direction and extending in the first direction;

an optical layer provided apart from the first columnar unit and the second columnar unit in the first direction;

a light emitting unit including;

a first semiconductor layer of a first conductivity type including;

a first semiconductor portion provided between at least part of the first columnar unit and the optical layer; and

a second semiconductor portion provided between the second columnar unit and the optical layer;

a second semiconductor layer of a second conductivity type provided between the second columnar unit and the second semiconductor portion; and

a light emitting layer provided between the second semiconductor portion and the second semiconductor layer; and

a resin unit covering a side surface along the first direction of the first columnar unit, a side surface along the first direction of the second columnar unit, a side surface of the light emitting unit, and a surface on a side of the first columnar unit and the second columnar unit of the light emitting unit,

the optical layer including a light transmissive resin and a plurality of particles dispersed in the light transmissive resin and configured to absorb at least part of a first light emitted from the light emitting layer and emit a second light of a wavelength different from a wavelength of the first light,

the optical layer including a first portion and a second portion provided between the first portion and the first semiconductor layer and including the particle at a concentration higher than a concentration of the particle in the first portion,

there being no seam between the first portion and the second portion,

wherein

a concentration of the particle in the first portion is 5% or less and more than 0%, and

a concentration of the particle in the second portion is not less than 40% and not more than 95%.

19. A semiconductor light emitting device comprising:

a conductive first columnar unit extending in a first direction;

a conductive second columnar unit provided apart from the first columnar unit in a second direction crossing the first direction and extending in the first direction;

an optical layer provided apart from the first columnar unit and the second columnar unit in the first direction;

a light emitting unit including;

a first semiconductor layer of a first conductivity type including;

a first semiconductor portion provided between at least part of the first columnar unit and the optical layer; and

a second semiconductor portion provided between the second columnar unit and the optical layer;

a second semiconductor layer of a second conductivity type provided between the second columnar unit and the second semiconductor portion; and

a light emitting layer provided between the second semiconductor portion and the second semiconductor layer; and

a resin unit covering a side surface along the first direction of the first columnar unit, a side surface along the first direction of the second columnar unit, a side surface of the light emitting unit, and a surface on a side of the first columnar unit and the second columnar unit of the light emitting unit,

the optical layer including a light transmissive resin and a plurality of particles dispersed in the light transmissive resin and configured to absorb at least part of a first light emitted from the light emitting layer and emit a second light of a wavelength different from a wavelength of the first light,

the optical layer including a first portion and a second portion provided between the first portion and the first semiconductor layer and including the particle at a concentration higher than a concentration of the particle in the first portion,

there being no seam between the first portion and the second portion,

wherein a thickness of the first portion is not less than 20 micrometers and not more than 100 micrometers and

a thickness of the second portion is 40 micrometers or more.