MAGNETIC FIELD PROBE AND PROBE HEAD THEREOF

• US 20140253112A1
• Filed: 03/06/2014
• Published: 09/11/2014
• Est. Priority Date: 03/06/2013
• Status: Active Grant

• Current Assignee: National Taiwan University (Government of The Republic of China)
• Original Assignee: National Taiwan University (Government of The Republic of China)
• Inventors: LU, Hsin-Chia, CHOU, Yien-Tien
• Granted Patent: US 9,684,040 B2
• Time in Patent Office: Days
• US Class Current: 324/244
• CPC Class Codes: G01R 33/0076 Protection, e.g. with housings against stray fields

Abstract

A magnetic field probe and a probe head thereof are disclosed herein. The probe head includes an inner metal layer, a shielding unit, and a filtering unit. The inner metal layer receives a magnetic field to be measured. The shielding unit, including a first shielding metal layer and a second shielding metal layer, shields the inner metal layer. The first and the second shielding metal layer are respectively stacked above and below the inner metal layer. The filtering unit, including a first filtering metal layer and a second filtering metal layer, filters out an electric field interfering with the inner metal layer. The first filtering metal layer is stacked between the first shielding metal layer and the inner metal layer. The second filtering metal layer is stacked between the second shielding metal layer and the inner metal layer.

Claims

1. A probe head comprising:

an inner metal layer configured for receiving a magnetic field to be measured;

a shielding unit configured for shielding the inner metal layer, the shielding unit comprising;

a first shielding metal layer stacked above the inner metal layer; and

a second shielding metal layer stacked below the inner metal layer; and

a filtering unit configured for filtering out an electric field interfering with the inner metal layer, the filtering unit comprising;

a first filtering metal layer stacked between the first shielding metal layer and the inner metal layer; and

a second filtering metal layer stacked between the second shielding metal layer and the inner metal layer.

2. The probe head of claim 1, wherein each of the first shielding metal layer and the second shielding metal layer comprises an annular shielding metal portion, each of the annular shielding metal portions has a gap.

3. The probe head of claim 1, wherein the first filtering metal layer comprises a first annular filtering metal portion, the second filtering metal layer comprise a second annular filtering metal portion, and each of the first annular filtering metal portion and the second annular filtering metal portion has a gap.

4. The probe head of claim 3, further comprising:

at least one connecting metal portion, wherein each of the first annular filtering metal portion and the second annular filtering metal portion is connected to the first shielding metal layer and the second shielding metal layer via the at least one connecting metal portion.

5. The probe head of claim 4, further comprising:

a first connecting metal portion, wherein the first annular filtering metal portion is connected to the first shielding metal layer via the first connecting metal portion; and

a second connecting metal portion, wherein the second annular filtering metal portion is connected to the second shielding metal layer via the second connecting metal portion.

6. The probe head of claim 3, further comprising:

at least one extending connection metal portion having a first end and a second end, wherein the first end is floating, and the second end is connected to one of the first annular filtering metal portion and the second annular filtering metal portion.

7. The probe head of claim 3, further comprising:

a first extending metal portion stacked between the first annular filtering metal portion and the first shielding metal layer, and the first extending metal portion being connected to the first annular filtering metal portion; and

a second extending metal portion stacked between the second annular filtering metal portion and the second shielding metal layer, and the second extending metal portion being connected to the second annular filtering metal portion.

8. The probe head of claim 7, further comprising:

a first shorting portion connected between the first extending metal portion and the first shielding metal layer; and

a second shorting portion connected between the second extending metal portion and the second shielding metal layer.

9. The probe head of claim 8, further comprising:

a plurality of first extending metal portions being sequentially connected between the first annular filtering metal portion and the first shielding metal layer, and one of the plurality of first extending metal portions being connected to the first annular filtering metal portion; and

a plurality of second extending metal portions being sequentially connected between the second annular filtering metal portion and the second shielding metal layer, and one of the plurality of second extending metal portions being connected to the second annular filtering metal portion.

10. The probe head of claim 9, further comprising:

a first shorting portion connected between one of the first extending metal portions and the first shielding metal layer; and

a second shorting portion connected between one of the second extending metal portions and the second shielding metal layer.

11. A magnetic field probe comprising:

a probe head comprising;

a first annular shielding metal portion having a gap;

a second annular shielding metal portion stacked below the first annular shielding metal portion, the second annular shielding metal portion having another gap, and a shape of the second annular shielding metal portion corresponding to a shape of the first annular shielding metal portion;

a receiving metal portion stacked between the first annular shielding metal portion and the second annular shielding metal portion, the receiving metal portion being configured for receiving a magnetic field to be measured to generate a sensing signal, the first annular shielding metal portion and the second annular shielding metal portion being configured for shielding the receiving metal portion;

a first annular filtering metal portion stacked between the first annular shielding metal portion and the receiving metal portion, the first annular filtering portion being configured for filtering out an electric field interfering with the receiving metal portion, and the first annular filtering metal portion having a first gap, a first end, and a second end across the first gap; and

a second annular filtering metal portion stacked between the second annular shielding metal portion and the receiving metal portion, the second annular filtering portion being configured for to filtering out the electric field interfering with the receiving metal portion, and the second annular filtering metal portion having a second gap, a third end, and a fourth end across the second gap; and

a probe body connected to the probe head, the probe body being configured for receiving the sensing signal from the receiving metal portion and transmitting the sensing signal to a measuring instrument.

12. The magnetic field probe of claim 11, wherein the probe head further comprises:

at least one connecting metal portion, wherein the first end of the first annular filtering metal portion and the third end of the second annular filtering metal portion are connected to the first annular shielding metal layer and the second annular shielding metal layer via the at least one connecting metal portion.

13. The magnetic field probe of claim 12, wherein the probe head further comprises:

a first shorting portion, wherein the second end of the first annular filtering metal portion is connected to the first annular shielding metal portion via the first shorting portion; and

a second shorting portion, wherein the fourth end of the second annular filtering metal portion is connected to the second annular shielding metal portion via the second shorting portion.

14. The magnetic field probe of claim 11, wherein the probe head further comprises:

a first extending metal portion stacked between the first annular filtering metal portion and the first annular shielding metal portion;

a first extending connection metal portion, wherein the first extending metal portion is connected to the second end of the first annular filtering metal portion via the first extending connection metal portion;

a second extending metal portion stacked between the second annular filtering metal portion and the second annular shielding metal portion; and

a second extending connection metal portion, wherein the second extending metal portion is connected to the fourth end of the second annular filtering metal portion via the second extending connection metal portion.

15. The magnetic field probe of claim 14, wherein the probe head further comprises:

a first shorting portion, wherein the first extending metal portion is connected to the first annular shielding metal portion via the first shorting portion; and

a second shorting portion, wherein the second extending metal portion is connected to the second annular shielding metal portion via the second shorting portion.

16. The magnetic field probe of claim 11, wherein the probe head further comprises:

a plurality of first extending metal portions being sequentially stacked between the first annular filtering metal portion and the first annular shielding metal portion;

a plurality of first extending connection metal portions, wherein each of the first extending metal portions is respectively connected to the upper-layer first extending metal portion and the lower-layer first extending metal portion via one of the first extending connection metal portions and one of the other first extending connection metal portions, and the first extending metal portion which is closest to the first annular filtering metal portion among all said first extending metal portions is connected to the first annular filtering metal portion via one of the first extending connection metal portions;

a plurality of second extending metal portions being sequentially stacked between the second annular filtering metal portion and the second annular shielding metal portion; and

a plurality of second extending connection metal portions, wherein each of the second extending metal portions is respectively connected to the upper-layer second extending metal portion and the lower-layer second extending metal portion via one of the second extending connection metal portions and one of the other second extending connection metal portions, and the second extending metal portion which is closest to the second annular filtering metal portion among all said second extending metal portions is connected to the second annular filtering metal portion via one of the second extending connection metal portions.

17. The magnetic field probe of claim 16, wherein the probe head further comprises:

a first shorting portion being connected between the first extending metal portion which is closest to the first annular shielding metal portion, and the first annular shielding metal portion; and

a second shorting portion being connected between the second extending metal portion which is closest to the second annular shielding metal portion, and the second annular shielding metal portion.

18. The magnetic field probe of claim 11, wherein the probe body further comprises:

a first shielding metal portion being connected to the first annular shielding metal portion;

a second shielding metal portion being stacked below the first shielding metal portion, and being connected to the second annular shielding metal portion; and

a transmitting metal portion configured for transmitting the sensing signal to the measuring instrument, and the transmitting metal portion being stacked between the first shielding metal portion and the second shielding metal portion.

19. The magnetic field probe of claim 18, wherein the probe body further comprises:

a plurality of shielding metal connection portions connected between the first shielding metal portion and the second shielding metal portion.