TEST PATTERN DESIGN FOR SEMICONDUCTOR DEVICES AND METHOD OF UTILIZING THEREOF
First Claim
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1. Method of inspection of a semiconductor device comprising:
- providing the semiconductor device having a plurality of line patterns disposed on a substrate wherein the plurality of line patterns are connected by an interconnecting line pattern;
exposing the plurality of line patterns to a responsive stimuli; and
measuring a response of the plurality of line patterns to the responsive stimuli, wherein the response of the plurality of line patterns indicates any one of a presence and an absence of a surface defect, an internal defect, and any combination thereof.
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Abstract
Methods and systems for the detection of defects in semiconductors, semiconductor devices, or substrates are provided. Semiconductors, semiconductor devices or substrates having novel test patterns and or designs are also provided. The semiconductors, semiconductor devices or substrates have a plurality of line patterns, which, in response to a responsive stimulus such as electron beam irradiation, produces a response. The responsive stimulus may include an electron beam irradiation, and the image data can be collected and processed to produce an image or images that indicate the presence or absence of surface and/or internal defects.
15 Citations
23 Claims
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1. Method of inspection of a semiconductor device comprising:
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providing the semiconductor device having a plurality of line patterns disposed on a substrate wherein the plurality of line patterns are connected by an interconnecting line pattern; exposing the plurality of line patterns to a responsive stimuli; and measuring a response of the plurality of line patterns to the responsive stimuli, wherein the response of the plurality of line patterns indicates any one of a presence and an absence of a surface defect, an internal defect, and any combination thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A semiconductor device comprising:
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a substrate; a dielectric layer disposed on the substrate; a plurality of conductive line patterns disposed in the dielectric layer; and at least one interconnecting line pattern configured to connect the plurality of conductive line patterns. - View Dependent Claims (13, 14, 15, 16)
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17. A method of fabricating a semiconductor device comprising:
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providing a substrate; forming a dielectric layer on the substrate; forming a plurality of trenches in the dielectric layer; forming at least one interconnecting trench in the dielectric layer interconnecting the plurality of trenches; and depositing a conductive material in the plurality of trenches and the at least one interconnecting trench. - View Dependent Claims (18, 19, 20, 21)
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22. A system for detecting a defect in a semiconductor device comprising:
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the semiconductor device having a test pattern, the semiconductor device comprising; a substrate; a dielectric layer disposed over the substrate; a plurality of conductive line patterns disposed in the dielectric layer; and
at least one interconnecting line pattern configured to connect the plurality of line patterns;an irradiating device for providing energy to the test pattern; a receiving device to receive data resulting from the irradiating device; and an imaging device to display an image that detects any one of a surface defect, an internal defect, and any combination thereof in the semiconductor device. - View Dependent Claims (23)
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Specification