INTEGRATED CIRCUIT TEST SYSTEM AND METHOD
First Claim
1. A system for testing a device under test (DUT), the system comprising:
- a probe card including;
a plurality of probe beds electrically coupled to a circuit board;
a first plurality of electrical contacts coupled to the circuit board, the first plurality of contacts for engaging respective ones of a plurality of electrical contacts of a test equipment module configured to provide test signals for testing the DUT;
a plurality of probes coupled to respective probe beds, the plurality of probes disposed to engage a plurality of electrical contacts of the DUT; and
a second plurality of electrical contacts coupled to the circuit board, wherein the first and second pluralities of contacts are mutually exclusive;
at least one test module including a plurality of electrical contacts electrically coupled to respective ones of the second plurality of electrical contacts of the probe card;
wherein the circuit board includes a first electrical path for electrically coupling the test equipment module to the test module.
1 Assignment
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Accused Products
Abstract
A system for testing a device under test (DUT) includes a probe card and a test module. The probe card includes probe beds electrically coupled to a circuit board and a first plurality of electrical contacts coupled to the circuit board, which are for engaging respective ones of a plurality of electrical contacts of a test equipment module. Probes are coupled to respective probe beds and are disposed to engage electrical contacts of the DUT. The probe card includes a second plurality of electrical contacts coupled to the circuit board. The first and second pluralities of contacts are mutually exclusive. The test module includes a memory, a processor, and a plurality of electrical contacts electrically coupled to respective ones of the second plurality of electrical contacts of the probe card. The circuit board includes a first electrical path for electrically coupling the test equipment module to the test module.
41 Citations
20 Claims
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1. A system for testing a device under test (DUT), the system comprising:
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a probe card including; a plurality of probe beds electrically coupled to a circuit board; a first plurality of electrical contacts coupled to the circuit board, the first plurality of contacts for engaging respective ones of a plurality of electrical contacts of a test equipment module configured to provide test signals for testing the DUT; a plurality of probes coupled to respective probe beds, the plurality of probes disposed to engage a plurality of electrical contacts of the DUT; and a second plurality of electrical contacts coupled to the circuit board, wherein the first and second pluralities of contacts are mutually exclusive; at least one test module including a plurality of electrical contacts electrically coupled to respective ones of the second plurality of electrical contacts of the probe card; wherein the circuit board includes a first electrical path for electrically coupling the test equipment module to the test module. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method comprising:
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at a test module, providing a first signal; sending the first signal to a probe card electrically coupled to the test module, wherein the probe card includes a plurality of probe beds coupled to respective probes among a plurality of probes; detecting a return of the first signal from the probe card; providing a second signal by a test equipment module electrically coupled to the probe card; detecting a round-trip propagation of the second signal from the test equipment module to the probe card and back to the test equipment module; for each path among a plurality of electrical paths through a circuit board of the probe card, sending a third signal along the path to the test module, wherein the path is coupled to a respective probe bed of the probe card; and sending a fourth signal from the test module to the test equipment module, wherein the fourth signal indicates a status of each path in the first plurality of electrical paths. - View Dependent Claims (16, 17, 18)
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19. A method comprising:
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sending a first signal from a test equipment module to a test module by way of first and second probes among a plurality of probes of a probe card, wherein the first probe is coupled to a first electrical contact of a device under test (DUT), the first electrical contact is coupled to a second electrical contact of the DUT, and the second probe is coupled to the second electrical contact; and sending a second signal from the test module to the test equipment module, wherein the second signal indicates a connectivity status of the first and second probes. - View Dependent Claims (20)
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Specification