SEMICONDUCTOR MICRO-ANALYSIS CHIP AND MANUFACTURING METHOD THEREOF
First Claim
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1. A semiconductor micro-analysis chip for detecting fine particles in sample liquid, comprising:
- a semiconductor substrate,a first flow channel provided in the semiconductor substrate, the sample liquid being introduced into the first flow channel, anda plurality of columnar structures fully laid at preset arrangement intervals in the first flow channel.
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Abstract
According to one embodiment, a semiconductor micro-analysis chip for detecting fine particles in sample liquid includes a semiconductor substrate, a first flow channel that is formed in the semiconductor substrate and into which the sample liquid is introduced, and a plurality of columnar structures fully arranged in the first flow channel at regulation distance.
23 Citations
20 Claims
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1. A semiconductor micro-analysis chip for detecting fine particles in sample liquid, comprising:
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a semiconductor substrate, a first flow channel provided in the semiconductor substrate, the sample liquid being introduced into the first flow channel, and a plurality of columnar structures fully laid at preset arrangement intervals in the first flow channel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A semiconductor micro-analysis chip for detecting fine particles in sample liquid, comprising:
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a semiconductor substrate formed of Si, a first flow channel provided in the semiconductor substrate, the sample liquid being introduced into the first flow channel, first columnar structures formed of one of Si, SiO2 and a composite material thereof, the first columnar structures being fully laid in the first flow channel at preset arrangement intervals and the arrangement interval being narrower in a downstream region of the first flow channel than in an upstream region thereof, a second flow channel provided to intersect with the first flow channel, and second columnar structures formed of one of Si, SiO2 and a composite material thereof, the second columnar structures being fully laid in the second flow channel at the same pitch as the columnar structures interval on the upstream side. - View Dependent Claims (16, 17)
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18. A manufacturing method of a semiconductor micro-analysis chip for detecting fine particles in sample liquid, comprising:
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forming a flow channel etching mask formed in a pattern of a flow channel and a column etching mask corresponding to columnar structures on a semiconductor substrate, and etching the semiconductor substrate from the surface thereof to preset depth by use of the respective etching masks to form a flow channel that permits the sample liquid to flow and a plurality of columnar structures fully laid in the flow channel. - View Dependent Claims (19, 20)
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Specification