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SEMICONDUCTOR MICRO-ANALYSIS CHIP AND MANUFACTURING METHOD THEREOF

  • US 20140256028A1
  • Filed: 08/28/2013
  • Published: 09/11/2014
  • Est. Priority Date: 03/07/2013
  • Status: Abandoned Application
First Claim
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1. A semiconductor micro-analysis chip for detecting fine particles in sample liquid, comprising:

  • a semiconductor substrate,a first flow channel provided in the semiconductor substrate, the sample liquid being introduced into the first flow channel, anda plurality of columnar structures fully laid at preset arrangement intervals in the first flow channel.

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