MULTIPLE AXIS RATE SENSOR
First Claim
1. A microelectromechanical systems (MEMS) device comprising:
- a first rate sensor;
a second rate sensor, said first and second rate sensors being configured to oscillate parallel to a planar surface;
drive elements in communication with at least one of said first and second rate sensors for providing a drive signal exhibiting a drive frequency; and
a first coupling spring structure interconnecting said first and second rate sensors, said first coupling spring structure enabling oscillation of said first and second rate sensors at said drive frequency in a drive direction dictated by said coupling spring structure, wherein said drive direction for said first rate sensor is a first drive direction associated with a first axis and said drive direction for said second rate sensor is a second drive direction associated with a second axis, said second axis being perpendicular to said first axis.
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Accused Products
Abstract
A microelectromechanical systems (MEMS) device includes at least two rate sensors (20, 50) suspended above a substrate (30), and configured to oscillate parallel to a surface (40) of the substrate (30). Drive elements (156, 158) in communication with at least one of the rate sensors (20, 50) provide a drive signal (168) exhibiting a drive frequency. One or more coupling spring structures (80, 92, 104, 120) interconnect the rate sensors (20, 50). The coupling spring structures enable oscillation of the rate sensors (20, 50) in a drive direction dictated by the coupling spring structures. The drive direction for the rate sensors (20) is a rotational drive direction (43) associated with a first axis (28), and the drive direction for the rate sensors (50) is a translational drive direction (64) associated with a second axis (24, 26) that is perpendicular to the first axis (28).
43 Citations
20 Claims
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1. A microelectromechanical systems (MEMS) device comprising:
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a first rate sensor; a second rate sensor, said first and second rate sensors being configured to oscillate parallel to a planar surface; drive elements in communication with at least one of said first and second rate sensors for providing a drive signal exhibiting a drive frequency; and a first coupling spring structure interconnecting said first and second rate sensors, said first coupling spring structure enabling oscillation of said first and second rate sensors at said drive frequency in a drive direction dictated by said coupling spring structure, wherein said drive direction for said first rate sensor is a first drive direction associated with a first axis and said drive direction for said second rate sensor is a second drive direction associated with a second axis, said second axis being perpendicular to said first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A microelectromechanical systems (MEMS) device comprising:
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a plurality of rate sensors configured to oscillate parallel to a planar surface; drive elements in communication with at least one of said rate sensors for providing a drive signal exhibiting a drive frequency; and coupling spring structures interconnecting said plurality of rate sensors, said coupling spring structures enabling oscillation of each of said plurality of rate sensors at said drive frequency in a drive direction dictated by said coupling spring structures, wherein; said drive direction for a first subset of said rate sensors is a rotational drive direction associated with a first axis that is perpendicular to said planar surface, such that said first subset of said rate sensors is driven into rotational oscillation about said first axis; and said drive direction for a second subset of said rate sensors is a translational drive direction associated with a second axis that is parallel to said planar surface, such that said second subset of said rate sensors is driven into translational oscillation parallel to said second axis. - View Dependent Claims (17, 18)
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19. A microelectromechanical systems (MEMS) device comprising:
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a first rate sensor; a second rate sensor; a third rate sensor; a fourth rate sensor, said first, second, third, and fourth rate sensors being configured to oscillate parallel to a planar surface; drive elements in communication with at least one of said first, second, third, and fourth rate sensors for providing a drive signal exhibiting a drive frequency; and a plurality of coupling spring structures including a first coupling spring structure interconnecting said first and second rate sensors, a second coupling spring structure interconnecting said second and third rate sensors, a third coupling spring structure interconnecting said third and fourth rate sensors, and a fourth coupling spring structure interconnecting said first and fourth rate sensors, said plurality of coupling spring structures enabling oscillation of each of said plurality of rate sensors at said drive frequency in a drive direction dictated by said coupling spring structures, wherein said drive direction for said first and fourth rate sensors is a first drive direction associated with a first axis and said drive direction for said second and third rate sensors is a second drive direction associated with a second axis, said second axis being perpendicular to said first axis. - View Dependent Claims (20)
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Specification