LEVER MECHANISMS FOR ANTI-PHASE MODE ISOLATION IN MEMS TUNING-FORK STRUCTURES
First Claim
1. A MEMS resonator comprising:
- two resonating masses having an anti-phase and in-phase resonance mode, each mode having a resonance frequency; and
an anti-phase resonance levering system coupled to the two resonating masses to stiffen and/or dampen the in-phase resonance mode while leaving the anti-phase resonance mode compliant by effectively raising the in-phase resonance frequency above the anti-phase resonance frequency, and potentially creating a large frequency separation between the two resonance modes, so that energy transfer is reduced between the two modes, allowing for robustness to external acceleration, because the in-phase mode is of a higher frequency.
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Abstract
A MEMS resonator includes two resonating masses having an anti-phase and in-phase resonance mode, each mode having a resonance frequency, and an anti-phase resonance levering system coupled to the two resonating masses to stiffen and/or dampen the in-phase resonance mode while leaving the anti-phase resonance mode compliant. This effectively raises the in-phase resonance frequency above the anti-phase resonance frequency, and potentially creates a large frequency separation between the two resonance modes. This reduces the energy transfer between the two modes, allowing for robustness to external acceleration, because the in-phase mode is of a higher frequency. The anti-phase resonance levering system is disposed between the two resonating masses as an internal levering mechanism, or is disposed around the two resonating masses as an external levering mechanism.
18 Citations
21 Claims
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1. A MEMS resonator comprising:
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two resonating masses having an anti-phase and in-phase resonance mode, each mode having a resonance frequency; and an anti-phase resonance levering system coupled to the two resonating masses to stiffen and/or dampen the in-phase resonance mode while leaving the anti-phase resonance mode compliant by effectively raising the in-phase resonance frequency above the anti-phase resonance frequency, and potentially creating a large frequency separation between the two resonance modes, so that energy transfer is reduced between the two modes, allowing for robustness to external acceleration, because the in-phase mode is of a higher frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A MEMS resonator comprising:
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two resonating masses having an anti-phase and in-phase resonance mode, each mode having a resonance frequency; and an anti-phase resonance levering system coupled to the two resonating masses, where the in-phase resonance frequency is higher than the anti-phase resonance frequency, while the anti-phase resonance is left compliant. - View Dependent Claims (19, 20, 21)
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Specification