VACUUM ISOLATION VALVE
First Claim
1. A vacuum isolation valve comprising:
- a housing installed between a chamber and a chamber cleaning gas supply and including a tube connecting the chamber to the chamber cleaning gas supply, for enabling communication between the chamber and the chamber cleaning gas supply;
a tube isolator formed at a predetermined position of the tube, for selectively isolating the tube;
a first blocking unit installed to the housing, for maintaining communication between the chamber and the chamber cleaning gas supply by moving in a first direction and selectively blocking an opened first surface of the tube isolator; and
a second blocking unit installed to the housing, for, when the first blocking unit moves in the first direction, maintaining communication between the chamber and the chamber cleaning gas supply by moving in a second direction and pressing the first blocking unit and for, when the first blocking unit moves in an opposite direction to the first direction, blocking communication between the chamber and the chamber cleaning gas supply by moving further in the second direction and passing through the first surface of the tube isolator, being inserted into the tube isolator, and blocking the tube, in close contact with a surface facing the first surface.
1 Assignment
0 Petitions
Accused Products
Abstract
The vacuum isolation valve includes a housing installed between a chamber and a chamber cleaning gas supply and including a tube connecting the chamber to the chamber cleaning gas supply, a tube isolator formed at a predetermined position of the tube, a first blocking unit installed to the housing, and a second blocking unit installed to the housing, for, when the first blocking unit moves in the first direction, maintaining communication between the chamber and the chamber cleaning gas supply by moving in a second direction and pressing the first blocking unit and for, when the first blocking unit moves in an opposite direction to the first direction, blocking communication between the chamber and the chamber cleaning gas supply.
6 Citations
17 Claims
-
1. A vacuum isolation valve comprising:
-
a housing installed between a chamber and a chamber cleaning gas supply and including a tube connecting the chamber to the chamber cleaning gas supply, for enabling communication between the chamber and the chamber cleaning gas supply; a tube isolator formed at a predetermined position of the tube, for selectively isolating the tube; a first blocking unit installed to the housing, for maintaining communication between the chamber and the chamber cleaning gas supply by moving in a first direction and selectively blocking an opened first surface of the tube isolator; and a second blocking unit installed to the housing, for, when the first blocking unit moves in the first direction, maintaining communication between the chamber and the chamber cleaning gas supply by moving in a second direction and pressing the first blocking unit and for, when the first blocking unit moves in an opposite direction to the first direction, blocking communication between the chamber and the chamber cleaning gas supply by moving further in the second direction and passing through the first surface of the tube isolator, being inserted into the tube isolator, and blocking the tube, in close contact with a surface facing the first surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
Specification