DC PULSE ETCHER

• US 20140263182A1
• Filed: 03/15/2013
• Published: 09/18/2014
• Est. Priority Date: 03/15/2013
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Chen, Lee, Sundararajan, Radha
• Application Number:
  US13/837,391
• Publication Number:
  US 20140263182A1
• Time in Patent Office: Days
• US Class Current: 216/71
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/32706 Polarising the substrate

Abstract

A method of selectively activating a chemical process using a DC pulse etcher. A processing chamber includes a substrate therein for chemical processing. The method includes coupling energy into a process gas within the processing chamber so as to produce a plasma containing positive ions. A pulsed DC bias is applied to the substrate, which is positioned on a substrate support within the processing chamber. Periodically, the substrate is biased between first and second bias levels, wherein the first bias level is more negative than the second bias level. When the substrate is biased to the first bias level, mono-energetic positive ions are attracted from plasma toward the substrate, the mono-energetic positive ions being selective so as to enhance a selected chemical etch process.

Claims

1. A method of selectively activating a chemical process for plasma-assisted chemical etch processing of a substrate in a processing chamber, the method comprising:

coupling energy into a process gas within the processing chamber to produce a plasma therein, the plasma containing positive ions;

applying a pulsed DC bias to the substrate positioned on a substrate support in the processing chamber; and

periodically biasing the substrate positioned on the substrate support between first and second bias levels, the first bias level being more negative than the second bias level,

wherein the substrate and substrate support, when biased at the first bias level, attracts mono-energetic positive ions from the plasma toward the substrate and is operable to enhance a selected chemical etch process at a surface of the substrate.

2. The method of claim 1, further comprising:

periodically biasing the substrate positioned on the substrate support at the second bias level, the periodic biasing having a magnitude and a duration configured to attract negative charges from the plasma toward the substrate and is operable to neutralize accumulated positive charge on the surface of the substrate.

3. The method of claim 2, wherein the substrate support includes a DC pulsed biased electrode positioned on one end of the processing chamber, the processing chamber further comprising:

an actively powered plasma generating electrode positioned on a side of the processing chamber opposing the DC pulsed biased electrode and configured to capacitively couple the energy into the process gas.

4. The method of claim 3, wherein the plasma generating electrode is DC powered, the method further comprising:

providing a grounding electrode in the processing chamber that is operably coupled to the plasma.

5. The method of claim 3, wherein the plasma generating electrode is RF powered and configured to capacitively couple energy into the process gas.

6. The method of claim 2, wherein said second bias level is established at a potential that minimizes the attraction of ions from the plasma toward the substrate with energies that are different from energies of ions attracted from the plasma toward the substrate when the first bias level is established.

7. The method of claim 1, wherein the pulsed DC bias is applied at a frequency that ranges from about 50 kHz to about 40 MHz.

8. The method of claim 7, wherein the pulsed DC bias is applied at a frequency that ranges from about 10 MHz to about 20 MHz.

9. The method of claim 1, further comprising:

providing a grounding electrode in the processing chamber that is operably coupled to the plasma.

10. The method of claim 9, further comprising:

applying a changing potential to the grounding electrode by one of switching a voltage potential applied to the grounding electrode, applying a pulsed DC voltage to the grounding electrode, or applying an AC voltage to the grounding electrode.

11. A plasma processing method, comprising:

supporting a substrate on a substrate support within a plasma processing chamber and at a first end thereof;

electrically energizing a plasma generating electrode at a second end of the processing chamber to capacitively couple energy into producing a plasma between the plasma generating electrode and the substrate, the second end opposing the first end; and

biasing the substrate on the substrate support with a pulsed DC waveform, the pulsed DC waveform applying a first voltage to the substrate for attracting positive ions from the plasma and onto the substrate and, periodically, applying a second voltage to the substrate that attracts electrons from the plasma and onto the substrate, the first voltage being more negative than the second voltage.

12. The plasma processing method of claim 11, wherein the pulsed DC waveform has a duty cycle ranging from about 1% to about 99%.

13. The plasma processing method of claim 11, wherein the pulsed DC waveform has a duty cycle selected so as to maintain mono-energetic ion energies while minimizing a charge-up effect on the substrate.

14. The plasma processing method of claim 11, wherein the plasma generating electrode is energized by an RF power source operating at 13.56 MHz.

15. The plasma processing method of claim 11, wherein the pulsed DC bias is applied at a frequency that ranges from about 10 MHz to about 20 MHz.

16. A plasma etching apparatus, comprising:

a plasma processing chamber;

a substrate support positioned within the plasma processing chamber and proximate a first end thereof;

a plasma generating electrode positioned proximate a second end of the plasma processing chamber, the second end opposing the first end;

a power supply operably coupled to the plasma generating electrode and configured to energize the plasma generating electrode so as to capacitively couple power into the plasma processing chamber to form a plasma between the substrate and the plasma generating electrode; and

a DC pulse generator operably coupled to the substrate support and configured to apply a pulsed DC bias voltage to a substrate on the substrate support,

wherein the DC pulse generator is configured to apply a first voltage to the substrate support that is operable to attract positive ions from the plasma and onto the substrate and, periodically, to apply a second voltage to the substrate support that is operable to attract electrons from the plasma and onto the substrate, the first voltage being more negative than the second voltage.

17. The plasma etching apparatus of claim 16, wherein the power supply operably coupled to the plasma generating electrode is an RF voltage source configured to operate at 13.56 MHz.

18. The plasma etching apparatus of claim 16, wherein the power supply operably coupled to the plasma generating electrode is a DC voltage source.

19. The plasma etching apparatus of claim 18, wherein the DC voltage source is electrically coupled to the plasma generating electrode via a relay switch.

20. The plasma etching apparatus of claim 16, wherein the plasma generating electrode further comprises a plurality of segments, each of the plurality of segments being electrically isolated from other segments of the plurality.

21. The plasma etching apparatus of claim 20, wherein the segments of the plurality are driven by the same power supply.

22. The plasma etching apparatus of claim 20, wherein the power supply operably coupled to the plasma generating electrode further comprises a plurality of power supplies, each of the plurality of power supplies being operably coupled to a respective one of the plurality of segments.

23. The plasma etching apparatus of claim 16, further comprising:

a grounded electrode operably coupled to a wall of the plasma chamber and positioned between the plasma generating electrode and the substrate support.

24. The plasma etching apparatus of claim 16, wherein the substrate support further comprises a plurality of segments, each of the plurality of segments being electrically isolated from other segments of the plurality.

25. The plasma etching apparatus of claim 24, wherein the segments of the plurality are driven by the same power supply.

26. The plasma etching apparatus of claim 24, wherein the DC pulse generator further comprises a plurality of DC generators, each of the plurality of DC generators being operably coupled to a respective one of the plurality of segments.