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PHASE CHANGE MATERIAL SWITCH AND METHOD OF MAKING THE SAME

  • US 20140264230A1
  • Filed: 03/14/2013
  • Published: 09/18/2014
  • Est. Priority Date: 03/14/2013
  • Status: Active Grant
First Claim
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1. A method for making a switch, the method comprising:

  • forming an insulating layer over a substrate;

    forming a resistive heater element over the insulating layer;

    depositing a thermally conductive electrically insulating barrier layer over the heating element;

    forming openings in the barrier layer aligned with ends of the resistive heater element;

    forming a phase change material (PCM) element over the barrier layer spaced apart and proximate to the resistive heater element; and

    forming conductive lines from ends of the PCM element and control lines from ends of the resistive heater element.

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