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SURFACE ROUGHENING TO REDUCE ADHESION IN AN INTEGRATED MEMS DEVICE

  • US 20140264655A1
  • Filed: 10/23/2013
  • Published: 09/18/2014
  • Est. Priority Date: 03/13/2013
  • Status: Abandoned Application
First Claim
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1. An integrated MEMS device comprising:

  • a MEMS substrate having a first contacting surface; and

    a base substrate coupled to the MEMS substrate having a second contacting surface;

    wherein at least one of the first contacting surface and the second contacting surface is roughened.

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