SUBSTRATE SUPPORT PLATE WITH IMPROVED LIFT PIN SEALING

• US 20140265097A1
• Filed: 03/13/2013
• Published: 09/18/2014
• Est. Priority Date: 03/13/2013
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: CUVALCI, OLKAN, TZU, GWO-CHUAN, YUAN, XIAOXIONG
• Granted Patent: US 10,857,655 B2
• Time in Patent Office: Days
• US Class Current: 269/53
• CPC Class Codes: B25B 11/00 Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders for holding or positioning work for welding, soldering, or cutting by applying heat locally B23K37/04; specially adapted to machine tools B23Q3/00
• CPC Class Codes: H01L 21/68742 characterised by a lifting arrangement, e.g. lift pins

Abstract

Embodiments of lift pin assemblies and substrate supports having such lift pin assemblies are provided herein. In some embodiments, a lift pin assembly includes a body with a first end including a flange and an opposing second end; a bore through the body from the first end to the second end; a profile on an outer surface proximate a second end; and a collar, wherein the profile is configured to removably lock the collar onto the second end.

Claims

1. A lift pin assembly, comprising:

a body with a first end including a flange;

a bore through the body;

a profile on an outer surface proximate a second end; and

a collar, wherein the profile is configured to removably lock the collar onto the second end.

2. The lift pin assembly of claim 1, wherein the flange comprises a thickness bounded by a flange top surface and an opposite flange bottom surface.

3. The lift pin assembly of claim 1, wherein the bore comprises a radially expanding portion proximate to the first end.

4. The lift pin assembly of claim 3, further comprising a lift pin disposed through the bore, the lift pin having a head with a surface that mates with the radially expanding portion to form a seal between the lift pin and the body.

5. The lift pin assembly of claim 1, wherein the body is formed from one or more of aluminum nitride, aluminum oxide, ceramic, coated or uncoated stainless steel, aluminum, nickel, or nickel-based alloys.

6. The lift pin assembly of claim 1, wherein the profile comprises an axial slot intersecting a circumferential slot.

7. The lift pin assembly of claim 6, further comprising a detent disposed in the circumferential slot.

8. The lift pin assembly of claim 6 wherein the circumferential slot encircles the second end.

9. A substrate support, comprising:

a plate having a top surface and an opposing bottom surface;

a hole formed through the plate, the hole including a counterbore or countersink at the top surface and a second counterbore disposed in the second surface of the plate about the hole;

a body with a first end including a flange configured to interface with the counterbore or countersink, an opposing second end, and a bore through the body, wherein the body is disposed within the hole such that the flange is disposed at least partially in the counterbore or countersink;

a collar removably coupled to the second end of the body; and

a resilient element disposed within the hole and compressed between the plate and the collar, wherein the resilient element biases the body against the plate.

10. The apparatus of claim 9, wherein the bore comprises a radially expanding portion proximate to the first end of the body.

11. The apparatus of claim 10, further comprising a lift pin disposed through the bore, the lift pin having a head with a surface that mates with the radially expanding portion to form a seal between the lift pin and the body.

12. The apparatus of claim 11, wherein the lift pin comprises one or more of aluminum nitride, aluminum oxide, ceramic, coated or uncoated stainless steel, aluminum, nickel, or nickel-based alloys.

14. The apparatus of claim 9, wherein the flange has a thickness that is greater than a depth of the counterbore or countersink.

15. The apparatus of claim 9, wherein the body comprises a ceramic material.

16. The apparatus of claim 15, wherein the ceramic material is aluminum nitride or aluminum oxide.

17. The apparatus of claim 9, further comprising a third counterbore disposed in the bottom surface about the second counterbore.

18. A substrate support, comprising:

a plate having a top surface and an opposing bottom surface;

a lift pin hole formed through the plate, the lift pin hole comprising a first portion at the top surface, the first portion comprising a base, a second portion proximate to the bottom surface comprising a shoulder; and

a third portion, linking the first and second portions and sized to accept the body, wherein the first portion is radially larger than the third portion, and the second portion is radially larger than the third portion;

a collar comprising an outer wall sized for axial displacement within the second portion, an inner wall forming the boundary of an aperture sized to accept the body and configured to engage the profile at a point along a length of the body to block axial displacement of the collar along the body; and

an upper surface between the outer wall and the inner wall; and

a resilient element having an outside dimension sized for axial displacement within the second portion, and an inner dimension greater than the third portion;

wherein the bushing is arranged within the lift pin hole such that the flange is at least partially within the first portion and the second end extends at least partially through the second portion, wherein the resilient element is arranged coaxially with the second portion and at least partially within the second portion, and wherein the collar is advanced along the body such that the body is received within the aperture and the upper surface at least partially compresses the resilient element against the shoulder and the inner wall engages the profile and blocks axial movement along the body.