PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH ANNULAR-SHAPED COLLAPSED REGION
First Claim
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1. A pre-collapsed capacitive micro-machined transducer cell comprising:
- a substrate comprising a first electrode,a membrane comprising a second electrode,an outer region where the membrane is mounted to the substrate,an inner region inside or surrounded by the outer region,wherein the membrane is collapsed to the substrate in a first collapsed annular-shaped region located within the inner region; and
wherein the cell has a first transition region inside or surrounded by the annular-shaped first collapsed region and a second transduction region outside or surrounding the annular-shaped first collapsed region.
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Abstract
The present invention relates to a pre-collapsed capacitive micro -machined transducer cell (10) comprising a substrate (12) comprising a first electrode (16), a membrane (14) comprising a second electrode (18), wherein the cell has an outer region (22) where the membrane (14) is mounted to the substrate (12) and an inner region (20) inside or surrounded by the outer region (22), wherein the membrane (14) is collapsed to the substrate (12) in a first collapsed annular-shaped region (24) located within the inner region (20).
47 Citations
16 Claims
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1. A pre-collapsed capacitive micro-machined transducer cell comprising:
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a substrate comprising a first electrode, a membrane comprising a second electrode, an outer region where the membrane is mounted to the substrate, an inner region inside or surrounded by the outer region, wherein the membrane is collapsed to the substrate in a first collapsed annular-shaped region located within the inner region; and wherein the cell has a first transition region inside or surrounded by the annular-shaped first collapsed region and a second transduction region outside or surrounding the annular-shaped first collapsed region. - View Dependent Claims (2, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 16)
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3. (canceled)
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14. A method of manufacturing a pre-collapsed capacitive micro-machined transducer cell, the method comprising:
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providing a substrate comprising a first electrode, providing a membrane comprising a second electrode, wherein the cell has an outer region where the membrane is mounted to the substrate, and an inner region inside or surrounded by the outer region, and collapsing the membrane to the substrate in a first collapsed annular-shaped region located within the inner region, wherein the method further comprises providing a first transition region inside or surrounded by the annular-shaped first collapsed region and a second transduction region outside or surrounding the annular-shaped first collapsed region. - View Dependent Claims (15)
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Specification