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PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH ANNULAR-SHAPED COLLAPSED REGION

  • US 20140265721A1
  • Filed: 11/05/2012
  • Published: 09/18/2014
  • Est. Priority Date: 11/17/2011
  • Status: Active Grant
First Claim
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1. A pre-collapsed capacitive micro-machined transducer cell comprising:

  • a substrate comprising a first electrode,a membrane comprising a second electrode,an outer region where the membrane is mounted to the substrate,an inner region inside or surrounded by the outer region,wherein the membrane is collapsed to the substrate in a first collapsed annular-shaped region located within the inner region; and

    wherein the cell has a first transition region inside or surrounded by the annular-shaped first collapsed region and a second transduction region outside or surrounding the annular-shaped first collapsed region.

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