Ultrasonic Transducer
First Claim
1. A device, comprising:
- a membrane;
a container having a base and at least one wall element, the at least one wall element situated over at least part of the base to form a cavity having an least partially open end, the at least partially open end of the cavity substantially sealed with the membrane; and
a piezoelectric flexure having a first end and a second end, the first end of the flexure fixed at a location at the at least one wall element, the second end of the flexure in mechanical communication with the membrane.
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Accused Products
Abstract
An ultrasonic transducer having a membrane and a container having a base and at least one wall element. The one or more wall elements can be situated over at least part of the base to form a cavity that can have an at least partially open end. The open end can be sealed with the membrane and the interior of the container can be maintained at a lower atmospheric pressure than the ambient pressure. Within the container, a piezoelectric flexure can be fixed at one end to a location at a wall element. The other end of the flexure can be in mechanical communication with the membrane, either directly or through a stiffener that is itself in communication with the membrane.
274 Citations
12 Claims
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1. A device, comprising:
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a membrane; a container having a base and at least one wall element, the at least one wall element situated over at least part of the base to form a cavity having an least partially open end, the at least partially open end of the cavity substantially sealed with the membrane; and a piezoelectric flexure having a first end and a second end, the first end of the flexure fixed at a location at the at least one wall element, the second end of the flexure in mechanical communication with the membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification